1975
DOI: 10.1364/josa.65.000025
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Analysis of a novel ellipsometric technique with special advantages for infrared spectroscopy

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Cited by 48 publications
(16 citation statements)
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“…The rotating analyser is speed-controlled [7] with an accuracy within 5 ppm at an angular frequency of 66.6 Hz. The harmonic detector signal is fed into a filter circuit where two frequencies are separated as described in refs.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The rotating analyser is speed-controlled [7] with an accuracy within 5 ppm at an angular frequency of 66.6 Hz. The harmonic detector signal is fed into a filter circuit where two frequencies are separated as described in refs.…”
Section: Methodsmentioning
confidence: 99%
“…The harmonic detector signal is fed into a filter circuit where two frequencies are separated as described in refs. [7,8]. The ellipsometric parameters A and 4 are calculated from the measured phase angles of the two frequencies.…”
Section: Methodsmentioning
confidence: 99%
“…Stobie el at (Ref. 20) discuss an IR ellipsometer that, in some cases, does not require such critical, absolute intensity measurements. Their ellipsometer has a stationary polarizer and analyzer and a rotating polarizer (Prot) in either P Prot S A or a P S Prot A configuration.…”
Section: Nonextinetion Methodsmentioning
confidence: 99%
“…1 Rotating element type is faster; thus it is more suitable for kinetic measurements, and can operate without a wavelength dependent compensator, which is important for spectroscopic applications. 5,[8][9][10] The conventional null type ellipsometer is still widely used in many laboratories. In this article the conversion of the null polarizer-compensator-sample-analyzer ͑PCSA͒ type ellipsometer into the rotating analyzer-fixed analyzer ͑PCSrotA-A͒ type, without sacrificing the null mode operation, is considered.…”
Section: Introductionmentioning
confidence: 99%