Passivated emitter and rear cell (PERC) has shifted to mass production and achieved great success in the past few years. [1][2][3] In comparison with aluminum back surface field (Al-BSF)-type solar cells, the rear-side surface recombination is significantly reduced by introducing a passivation layer between silicon substrate and electrodes, which can boost both open-circuit voltage and short-circuit current. [4] Later, the average industrial conversion efficiency of p-type mono-silicon PERC has achieved 22.5-22.8% and even beyond 23% for few leading photovoltaic manufacturers, with the continuously evolving optimizations in industrialization technology, e.g., emitter doping optimization, [5,6] laser-doped selective emitter, [7,8] front surface anti-reflection and passivation, [9][10][11] and reduced shading loss and electrode contact. [12,13] Longi solar has released the world record R&D efficiency of 24.06% on a commercial-sized PERC, [14] which means there still exists a gap of %1% absolute in conversion efficiency moving from laboratory R&D efficiency toward mass production efficiency.An effective solution to further enhance the power generation capacity is the employment of a bifacial PERC structure. The bifacial PERC and module have the potential to absorb the scattered and reflected light on the back of the solar module, which can boost the module power output up to 30% and lower the levelized cost of electricity (LCOE). [15][16][17] However, the bifacility of p-type PERC is lower than that of other high-efficiency concepts, such as tunnel oxide passivated contact (TOPCon) and silicon heterojunction (SHJ) solar cell, limited by its obviously decreased short-circuit current at the rear side. Dullweber et al. first presented the novel bifacial PERC design by screen printing rear-side aluminum (Al) fingers instead of full-area Al-BSF, with a bifaciality of 79.3%, [18] and pioneered the bifacial application of PERC solar cells. The influence of rear-side morphology effects the passivation property significantly. A smooth rear surface is preferred to obtain high open-circuit voltage, [19,20] but suffers from rear-side light trapping limitation. One has to balance the rear passivation and photon absorption. Meanwhile, the deposition of a high-quality rear passivation film also helps the improvement of rear-side efficiency. The Al 2 O 3 film, SiO 2 film, SiN x film, and their stack layers have been studied to provide both excellent hydrogen passivation and chemical