Analysis of Electrical Responses of MEMS Piezoresistive Microcantilever

Rahim, Rosminazuin Ab; Abubakkar, Sheik Fareed Ookar; Bais, Badariah; Majlis, Burhanuddin Yeop

doi:10.1109/iccce.2014.45

Cited by 1 publication

(1 citation statement)

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“…It has been used in many applications and research studies, including the fabrication of monolithic Wheatstone bridge circuits ( 18 , 19 ) are the analysis of electrical responses of MEMS piezoresistive microcantilevers. Microcantilevers have been widely used in medical applications such as the induced mass change technique for glucose detection ( 20 – 22 ). Microcantilever sensor work is mainly based on maximum surface stress generation due to applied force at the cantilever tip.…”

Section: Type Of Optical Mems Sensors With Applicationmentioning

confidence: 99%

A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application

Upadhyaya

Hasan

Abdel‐Khalek

et al. 2021

Front. Public Health

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This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opto electromechanical system (MOEMS). Optical MEMS comprises sensing and influencing optical signals on micron-level by incorporating mechanical, electrical, and optical systems. Optical MEMS devices are widely used in inertial navigation, accelerometers, gyroscope application, and many industrial and biomedical applications. Due to its miniaturised size, insensitivity to electromagnetic interference, affordability, and lightweight characteristic, it can be easily integrated into the human body with a suitable design. This study presented a comprehensive review of 140 research articles published on photonic MEMS in biomedical applications that used the qualitative method to find the recent advancement, challenges, and issues. The paper also identified the critical success factors applied to design the optimum photonic MEMS devices in biomedical applications. With the systematic literature review approach, the results showed that the key design factors could significantly impact design, application, and future scope of work. The literature of this paper suggested that due to the flexibility, accuracy, design factors efficiency of the Fibre Bragg Grating (FBG) sensors, the demand has been increasing for various photonic devices. Except for FBG sensing devices, other sensing systems such as optical ring resonator, Mach-Zehnder interferometer (MZI), and photonic crystals are used, which still show experimental stages in the application of biosensing. Due to the requirement of sophisticated fabrication facilities and integrated systems, it is a tough choice to consider the other photonic system. Miniaturisation of complete FBG device for biomedical applications is the future scope of work. Even though there is a lot of experimental work considered with an FBG sensing system, commercialisation of the final FBG device for a specific application has not been seen noticeable progress in the past.

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Section: Type Of Optical Mems Sensors With Applicationmentioning

confidence: 99%