Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

Tuan, Do Anh

doi:10.5370/jeet.2016.11.2.455

Cited by 6 publications

(2 citation statements)

References 14 publications

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“…The present results agree well over the common E/N range. The present values of drift velocity for He, shown in Figure 6, are in good agreement with the previous experimental values of Kucukarpaci[22] and theoretical values of Raju [21] and Tuan [23].…”

Section: Resultssupporting

confidence: 92%

Dielectric Breakdown Properties of He-H2 Mixtures for High Temperature Superconducting Power Devices

Othman

Ibrahim

Taha

2022

Iraqi Journal of Science

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In this study, the electron energy distribution function (EEDF), the electron swarm parameters , the effective ionization coefficients, and the critical field strength (dielectric strength) in binary He-H2 gas mixture which is used as cryogenic for high-temperature superconducting power applications, are evaluated using two-term solution of the Boltzmann equation over the range of E/N ( the electric field to gas density) from 1 to 100 Td ( 1 Td=10-17 Vcm2) at temperature 77 K and pressure 2MPa, taking into account elastic ( momentum transfer) and inelastic cross-sections. Using the electron energy distribution function (EEDF) electron swarm parameters (electron drift velocity, mean electron energy, diffusion coefficient, electron mobility, ionization and attachment coefficient) are calculated. At low reduced electric field strength E/N, the EEDF is close to Maxwellian distribution, at high E/N, due to vibrational excitation of H2, the calculated distribution function is non-Maxwellian. Besides, the Boltzmann equation analysis showed as the small mole fraction of H2 in the He-H2 mixture is increased, the electron energy distribution function EEDF shifts to lower energy region, the density-reduced ionization coefficient α/N and density-reduced effective ionization coefficient (α-η)/N decreases, whereas density-reduced attachment coefficient η/N, density-reduced critical electric field strength increases, (E/N)crt and critical electric field Ecrt increases. It is found that dielectric field strength depends on pressure and temperature. To confirm the validity of the two term solution of Boltzmann equation analysis, a set of elastic and inelastic cross-sections for each gas He and H2 are used to calculate the electron swarm parameters and dielectric field strength. Compared with previous experimental and theoretical literatures, the values obtained are generally in good agreement.

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Section: Resultssupporting

confidence: 92%

Dielectric Breakdown Properties of He-H2 Mixtures for High Temperature Superconducting Power Devices

Othman

Ibrahim

Taha

2022

Iraqi Journal of Science

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“…From the computed drift velocity v d the reduced ionization and attachment coefficients are obtained as (Tuan, 2014(Tuan, , 2016,…”

Section: Transport Parametersmentioning

confidence: 99%

Transport Parameters and Dielectric Strength of Electrical Discharges in an Arc Discharges in Carbon Dioxide Gas

2020

ZJPAS

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The two-term approximation solution of Boltzmann equation analysis has been used to calculate the electron energy distribution function (EEDF), dielectric strength and the electron swarm parameters in carbon dioxide. The electron swarm parameters have been calculated over the wide range of reduced density electric field strength E/N varying from 0.1 to 1000 Td ( 1Td= 10 -17 V.cm 2 ). These parameters, namely electron drift velocity, mean electron energy, electron temperature, characteristic energy, transverse diffusion coefficient, electron mobility, reduced ionization and attachment Townsend coefficients have been compared with the available previous theoretical and experimental results. The values of the critical reduced electric field strength (E/N) cr from the curves of reduced effective ionization coefficient (α-η)/N are calculated. In addition, excitation rate and fractional power transfer to elastic and inelastic collisions are explained.

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Studying Effect of Adding Buffer Gases to TRIES Gas on the Electron Transport Coefficients

Hien

Tuoi

Nhung

et al. 2019

Advances in Engineering Research and Application

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Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

Cited by 6 publications

References 14 publications

Dielectric Breakdown Properties of He-H2 Mixtures for High Temperature Superconducting Power Devices

Dielectric Breakdown Properties of He-H2 Mixtures for High Temperature Superconducting Power Devices

Transport Parameters and Dielectric Strength of Electrical Discharges in an Arc Discharges in Carbon Dioxide Gas

Studying Effect of Adding Buffer Gases to TRIES Gas on the Electron Transport Coefficients

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