2022
DOI: 10.1109/tcst.2021.3121321
|View full text |Cite
|
Sign up to set email alerts
|

Analysis of PI-Control for Atomic Force Microscopy in Contact Mode

Abstract: This article investigates the properties, from a nonlinear control system standpoint, of atomic force microscope (AFM) systems, whenever operated in contact mode and controlled in the vertical direction by proportional-integral control law. By modeling the AFM as a system in which a piezo-electric actuator and a cantilever mutually interact in order to produce the sample topography, ensuing distortions affecting the quality of the yielded topography measurement are naturally cast and analyzed. The proposed inv… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(1 citation statement)
references
References 17 publications
0
1
0
Order By: Relevance
“…While the theoretical explanation for creep in piezoceramics attributes it to a gradual realignment of crystalline domains under a constant electric field, resulting in a change in remnant polarization and undesirable drift [12][13][14], this explanation does not directly translate to LUMs. Unlike conventional piezoelectric actuators, LUMs utilize piezoceramics at ultrasonic frequencies, where creep is likely negligible.…”
Section: Introductionmentioning
confidence: 99%
“…While the theoretical explanation for creep in piezoceramics attributes it to a gradual realignment of crystalline domains under a constant electric field, resulting in a change in remnant polarization and undesirable drift [12][13][14], this explanation does not directly translate to LUMs. Unlike conventional piezoelectric actuators, LUMs utilize piezoceramics at ultrasonic frequencies, where creep is likely negligible.…”
Section: Introductionmentioning
confidence: 99%