To study the mechanism of the deflector jet servo valve under temperature shock, a complete temperature theoretical model is proposed in this article. The temperature change affects the performance change of the torque motor by affecting the drift of the air gaps’ thickness, the permanent magnets’ reluctance, and the magnetomotive polarization force. Moreover, the temperature variation will act on the flow coefficient of the pilot stage, the size of the deflector, and jet pan, which influences the performance of the pilot stage hydraulic amplifier. Furthermore, the armature components, including the stiffness of the spring tube, the stiffness of the feedback rod, and the armature’s arm of force, are also related to the temperature variation. Comprehensively, considering the interaction influence of these factors, by analyzing the electromagnetic characteristics of the torque motor, the fluid mechanics’ characteristics of the pilot stage hydraulic amplifier, and the temperature performance of the armature assembly, the temperature drift model of deflector jet servo valve is constructed, which is represented as a ninth-order nonlinear equation. Based on the equation, the influence of temperature on the control precision of the servo valve is analyzed. The calculation results show that in the range of 20°C–250°C, the impact of temperature on the control accuracy will exceed 30%, the flow coefficient is the most significant affecting on the control accuracy, followed by the structural deformation of the pilot stage is the second factor affecting the temperature drift, and other factors have little effect. Comparison with the experimental results, the temperature drift model of the deflector jet servo valve can predict the control accuracy caused by temperature and provide a theoretical foundation for the optimization of the deflector jet servo valve.