Analysis of r.f.-sputtered TiB2 hard coatings by means of X-ray diffractometry and Auger electron spectroscopy

Lohmann, Rainer; Österschulze, E.; Thoma, Klaus; Gärtner, H.; Herr, W.; Matthes, Bernd; Broszeit, E.; Kloos, K. H.

doi:10.1016/0921-5093(91)90626-x

Cited by 49 publications

(18 citation statements)

References 2 publications

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“…Chemical composition and properties of Cr-V-N thin films On the other hand, the CrN (111) peak intensity gradually decreases with increasing V content and CrN and VN disappears entirely from the XRD pattern of the 38 at-% V coating. This may be due to the presence of an in plane compressive stress19 and/or the substitution of V atoms into some Cr lattice sites. Unlike, the Cr 2 N (002) and (111), VN (111), and V 2 N (110) orientations gradually emerged in the XRD patterns; this can be related to the increase in the applied power of the V target.…”

mentioning

confidence: 99%

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

Aissani¹,

Nouveau²,

Walock³

et al. 2015

Surface Engineering

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This work aims to show the characterisation of Cr-V-N coatings, with the varied amounts of Cr and V. CrN, VN and Cr-V-N coatings were deposited onto silicon and XC100 steel substrates by reactive radio frequency magnetron sputtering and characterised with X-ray diffraction, X-ray photoelectron spectroscopies, energy dispersive X-ray spectroscopy, scanning electron microscopy, nanoindentation, pin on disc tribological tests and scratch tests. The residual stress was calculated using the Stoney formula. Compared to the CrN system, the Cr-V-N films presented a rough surface based on pyramidal morphology. A hardness of 19?53 GPa and a friction coefficient of 0?55 were obtained for CrN; in contrast, Cr-V-N coatings presented a weak hardness of 6?23 GPa. In the case of wear against a 100Cr6 ball, the Cr-V-N films were completely removed from the substrate, even though the Cr-V-N coating presented a low friction coefficient (0?39). However, the VN film showed good tribological performance.

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confidence: 99%

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

Aissani¹,

Nouveau²,

Walock³

et al. 2015

Surface Engineering

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“…Lohmann et al [23] studied TiB 2 coatings on steel, and reported that the stress of the lattice in a direction parallel to the surface could affect the lattice parameter (i.e. diffraction angle) perpendicular to the surface.…”

Section: Resultsmentioning

confidence: 98%

ZnS/ZnO:Mn phosphor layer produced by thermal sulfidation of RF magnetron sputtered ZnO:Mn films

Nien

Tsai

Chen

2006

Journal of Crystal Growth

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“…So, unsurprisingly, this first batch of multilayers has a predominantly nanocrystalline microstructure due to repeated nucleation of randomly oriented grains. Nonstoichiometric deposition of TiB 2 has previously has been observed both when sputtering in argon [11,12] and when sputtering in Ar/N 2 [13]. A progressive increase in the partial pressure of N 2 in the sputtering atmosphere can result in a transition from the deposition of TiB 2 to that of a Ti(B,N) amorphous complex; the latter having significantly degraded mechanical properties [13].…”

Section: Discussionmentioning

confidence: 99%

Characterisation of High Strength TiN/TiB _x Multilayered Ceramic Coatings

Steer

Inkson

2000

Interface Controlled Materials

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The microstructure of ceramic multilayered coatings deposited using TiN and TiB 2 targets has been investigated using HRTEM, EELS mapping and XRD. The coatings predominantly consist of nanocrystalline layers of alternating TiN and TiB, the latter being deposited nonstoichiometrically from the TiB 2 target as TiB.B27. Deposition of regions which are highly deficient in boron results in the coherent growth of large columnar TiN grains through many multilayer periods. IntroductionImprovements to the lifetimes of metal cutting tools have long been achieved by applying hard coatings. Current physical vapour deposition techniques provide the means of fabricating various configurations such as single-layer coatings, multiphase composite coatings, and complex configurations of two or more materials in multilayered or phase-gradient coatings [1].As outlined by Quinto [2], the major properties required by a hard coating are good adhesion, high microhardness and good chemical stability (especially with respect to the workpiece) at the working temperature. The choice of a TiN/TiB 2 multilayered ceramic system was made with these parameters in mind. The suitability of TiN as a hard coating is demonstrated by its widespread use in prolonging the lives of high speed metal cutting tools in industry [3]. TiB 2 is also an extremely hard and chemically stable ceramic, finding many applications as an inert dispersion hardener, particularly in structural intermetallic alloys.An especially good adhesion of TiN to TiB 2 has been predicted by Holleck [4] who noticed similar Ti lattice spacings on the TiN (111) and the TiB 2 (0001) planes suggesting a possible coherency between the layers. TiB 2 is observed to grow epitaxially on bcc metals with the relationship (10-10) TiB2 //(001) bcc and <0001> TiB2 //<010> bcc , where atomic matching occurs at the (10-10) TiB2 // (001) bcc Ti interface plane [5]. We can therefore predict a similar TiN -TiB 2 epitaxial growth relationship of (10-10) TiB2 // (001) TiN and <0001> TiB2 // <110> TiN , with low misfit matching on the (10-10) TiB2 // (001) TiN Ti planes.The use of multilayered systems has been shown to be of profound benefit to the hardness of coatings due to the addition of the layer interfaces and periodic changes in elastic modulus which are thought to hinder the movements of defects [6,7]. Many multilayered systems use layers of similar crystal structure in an attempt to guarantee coherence between the alternating materials; for instance the nitride films [8] which use transition metal nitrides with the NaCl Interface Controlled Materials. Edited by M. Rühle and H. Gleiter

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Analysis of r.f.-sputtered TiB2 hard coatings by means of X-ray diffractometry and Auger electron spectroscopy

Cited by 49 publications

References 2 publications

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

ZnS/ZnO:Mn phosphor layer produced by thermal sulfidation of RF magnetron sputtered ZnO:Mn films

Characterisation of High Strength TiN/TiB _x Multilayered Ceramic Coatings

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Analysis of r.f.-sputtered TiB2 hard coatings by means of X-ray diffractometry and Auger electron spectroscopy

Cited by 49 publications

References 2 publications

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

Influence of vanadium on structure, mechanical and tribological properties of CrN coatings

ZnS/ZnO:Mn phosphor layer produced by thermal sulfidation of RF magnetron sputtered ZnO:Mn films

Characterisation of High Strength TiN/TiB x Multilayered Ceramic Coatings

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Characterisation of High Strength TiN/TiB _x Multilayered Ceramic Coatings