Herein we report the construction of a Wagner chemical state plot for beryllium containing the: metallic, oxide, nitride and carbide forms of beryllium by combining electron beam induced AES and XPS data. AES and XPS values were collected from metallic beryllium mechanically abraded in vacuum, bulk and native beryllium oxide and homogeneous secondary-phase beryllium nitride and beryllium carbide inclusions. XPS data for beryllium nitride and carbide were obtained from the literature.The concept of the Auger parameter was introduced by Wagner [1] in order to extract further information from the Auger and photoelectron transitions present in the XPS spectrum. The Auger parameter, α, was originally defined as shown in Equation 1:Where EK (jkl) is the kinetic energy of the Auger transition and EK (i) is the kinetic energy of the photoelectron line. This occasionally led to negative values and so a modified Auger parameter, α*, was introduced, which is shown in Equation 2:Where hν is the kinetic energy of the exciting x-ray photon and EB (i) is the binding energy of the photoelectron.