Radiation Effects and Defects in Solids
 2007
DOI: 10.1080/10420150701241097
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Analysis of the composition of Ti-based thin films deposited on silicon by means of self-ion assisted deposition

Игорь Серафимович Ташлыков1,
P. Żukowski2,
S. M. Baraishuk3
et al.
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