2022 23rd International Conference on Electronic Packaging Technology (ICEPT) 2022
DOI: 10.1109/icept56209.2022.9873218
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Analysis of the effects of thermo-mechanical stress on the frequency shift of MEMS resonators

Xiaorui Bie
1
,
Xudong Zou
2
,
Xiong Xingyin
3
et al.
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Cited by 2 publications
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