Analysis of the Intermediate Layers Generated at the Film-Substrate Interface During the CVD Process of Diamond Synthesis

A New CVD Route for the Synthesis of Composite Diamond-Based Materials

“…However, whereas metal-and silicon-containing diamondlike or amorphous carbon films have been the subject of extensive research work [1±3] and today have a range of established applications, up to now only a limited number of papers have been reported the preparation of composite layers with the structure of crystalline diamond. [4,5] To address the issue of depositing composite diamondbased layers, we have recently developed a new CVDbased technique.[6] The diamond-based deposits are produced through the activation of hydrocarbon/hydrogen mixtures by a hot filament in a CVD reactor [7] equipped with a powder spraying system specifically designed and realized for the present investigation. The spraying system essentially consists of a powder reservoir, a nozzle, and a tubing system connecting them.…”