Analysis of thin layers by total-reflection X-ray fluorescence spectrometry

Hoffmann, P.; Lieser, Κ. H.; Hein, Matthias; Flakowski, M.

doi:10.1016/0584-8547(89)80052-7

Cited by 14 publications

(5 citation statements)

References 3 publications

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“…In general, the selection of pure sample-carriers free of metals is very important for the determination of small amounts. 8 …”

Section: Cleaning Of Polyester Sheetmentioning

confidence: 99%

“…Schmitt et al 7 proposed a Perspex sheet (polymethylmethacrylate) sample-carrier, which is weak in acid corrosion but usable without precleaning. Hoffmann et al 8 tested the drying methods of a water droplet using a 2 µm thick Mylar foil.The present study was carried out on the assumption that a silicon wafer is used as the sample-carrier, because the commercially available pieces of TXRF apparatus are currently designed for the inspection of silicon wafers. In order to use repeatedly an expensive silicon wafer sample-carrier, a disposable cover of hydrophobic film was examined.…”

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TXRF Analysis of Solution Samples Using Polyester Film as a Disposable Sample-Carrier Cover

et al. 1998

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In the total reflection X-ray fluorescence (TXRF) analysis, a primary X-ray beam with a small glancing angle is totally reflected on the surface of an analytical sample. Such a configuration of the radiation makes it possible to reduce significantly the amount of the scattered X-rays entering the detector. Consequently, the signal/noise ratio was significantly improved and the ultra-trace analysis was realized. 1 Since the total reflection requires an optically flat surface, the analytical targets have been mainly the silicon wafers important as semiconductor materials and the various solid thin films produced in laboratories. On the other hand, TXRF analysis of a liquid sample has been studied using a sample-carrier on which the liquid is dropped and dried. In the earlier studies, quartz plate samplecarriers were utilized, but cleaning before every use was indispensable. Moreover, a quantitative analysis of phosphor and aluminum was difficult. In order to avoid the interference due to the characteristic X-ray from the sample carrier, the alternatives such as germanium and boron nitride have been also studied. [2][3][4][5] However, these materials are too expensive to use in routine analysis. Recently, Wobrauschek and Aiginger 6 used thin foils of Mylar (polyethylene terephthalate) and Kapton (polyimide). Schmitt et al. 7 proposed a Perspex sheet (polymethylmethacrylate) sample-carrier, which is weak in acid corrosion but usable without precleaning. Hoffmann et al. 8 tested the drying methods of a water droplet using a 2 µm thick Mylar foil.The present study was carried out on the assumption that a silicon wafer is used as the sample-carrier, because the commercially available pieces of TXRF apparatus are currently designed for the inspection of silicon wafers. In order to use repeatedly an expensive silicon wafer sample-carrier, a disposable cover of hydrophobic film was examined. The disposable cover is also useful to reduce the influence of the characteristic X-ray of silicon. In the present study, optimum measuring conditions of TXRF have been studied using polyester (polyethylene terephthalate) film. The relative sensitivity factors of analytes to the internal standard element (scandium) yielded a satisfactory result for the analysis of iron and steel samples. Experimental EquipmentThe TXRF apparatus used is a TREX610 spectrometer (Technos, Japan). The X-ray source was a rotating tungsten counter-cathode, which was operated at 30 kV-150 mA. The emitted W L β1 rays were monochromatized in an analytical crystal (LiF 200 ). The fluorescent X-rays were detected with a Si(Li) solid-state detector cooled with liquid nitrogen. The effective measuring area of the detector was about 80 mm 2 (φ10 mm). The energy resolution was about 150 eV for the Mn K α spectrum (5.895 keV). Cover film and fixingPolyester film was selected as the cover of samplecarrier, because it is hydrophobic and the fluorescence of its components does not disturb the TXRF analysis of metallic impurities. Moreover, polyester film has a sufficient...

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“…In general, the selection of pure sample-carriers free of metals is very important for the determination of small amounts. 8 …”

Section: Cleaning Of Polyester Sheetmentioning

confidence: 99%

mentioning

confidence: 99%

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TXRF Analysis of Solution Samples Using Polyester Film as a Disposable Sample-Carrier Cover

et al. 1998

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“…Polymer films can also be used as a disposable sample holder; some of them are commercially available. Hoffmann et al 5 performed TXRF analysis using a Mylar film placed on a quartz glass substrate as a sample holder. Yamaguchi et al 6 reported that the use of a silicon wafer sample holder covered with a polyester film is more useful for detecting the Al Kα and P Kα lines than a silicon wafer sample holder.…”

Section: Introductionmentioning

confidence: 99%

Trace Elemental Determination Using a Portable Total Reflection X-Ray Fluorescence Spectrometer with a Collodion Film Sample Holder

Kunimura

Shinkai

2017

ANAL. SCI.

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Using a portable total-reflection X-ray fluorescence (TXRF) spectrometer with a collodion film sample holder, a spectrum of an analyte containing 50 ng of aluminum was measured. The Al Kα line (1.49 keV) that partially overlaps with the Si Kα line (1.74 keV) from a quartz glass substrate usually used as a sample holder for TXRF analysis, was clearly detected when using the collodion film sample holder. To investigate the quantitative performance of the portable spectrometer with a collodion film sample holder, the concentrations of Cr, Mn, and Fe in a certified reference material of river water (JSAC 0302-3b), whose certified values are 10.0, 5.1, and 59.6 μg/L, respectively, were determined by the internalstandard method. We showed that approximate concentrations of these elements were determined.

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“…Schmitt et al 9) demonstrated TXRF spectrometry with a Perspex sheet sample holder. Hoffmann et al 10) used a Mylar film placed on a quartz glass substrate as sample holder. Yamaguchi et al 11) used a polyester film as a disposable cover for a silicon wafer sample holder.…”

Section: Introductionmentioning

confidence: 99%

Portable Total Reflection X-ray Fluorescence Spectrometer with a Collodion Film Sample Holder

2015

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Grazing incidence X-ray fluorescence analysis with a collodion film sample holder was performed by using a portable total reflection X-ray fluorescence spectrometer. The spectral background was low when using this sample holder, and a Cr detection limit obtained with this sample holder was comparable to that obtained with a diamond-like carbon coated quartz glass sample holder which was usually used as sample holder for the portable spectrometer. A river water sample was also measured with the collodion film sample holder, and 10.0 μg/L of Cr and 5.1 μg/L of Mn were detected. Collodion film sample holder can be used as a disposable sample holder for trace elemental analysis using the portable spectrometer.

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Analysis of thin layers by total-reflection X-ray fluorescence spectrometry

Cited by 14 publications

References 3 publications

TXRF Analysis of Solution Samples Using Polyester Film as a Disposable Sample-Carrier Cover

TXRF Analysis of Solution Samples Using Polyester Film as a Disposable Sample-Carrier Cover

Trace Elemental Determination Using a Portable Total Reflection X-Ray Fluorescence Spectrometer with a Collodion Film Sample Holder

Portable Total Reflection X-ray Fluorescence Spectrometer with a Collodion Film Sample Holder

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