Analysis of Vibration Effect to Surface Figure Measurement

Rudong, 王汝冬 Wang; Wei, 田伟 Tian; Ping, 王平 Wang; Lipeng, 王立朋 Wang

doi:10.3788/aos201232.1112001

Cited by 2 publications

(2 citation statements)

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“…The presence of eccentricity error can impact the imaging quality of optical systems. For optical lenses, due to their inherent rotational asymmetry, this can result in various aberrations such as astigmatism, coma, and distortion [18]. In lithography systems, the projection lens is susceptible to external environmental factors during the exposure process, including variations in temperature and air pressure, as well as vibrations from the surroundings.…”

Section: Introductionmentioning

confidence: 99%

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A Model-Based Approach for Measuring Wavefront Aberrations Using Random Ball Residual Compensation

Li,

Quan,

Jin

et al. 2023

Photonics

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The projection objective lens holds a pivotal role in lithography, directly influencing imaging system quality and, consequently, the lithography machine’s feature dimensions. Optical inspection methods for this lens require advancements in calibrating systematic error and enhancing alignment precision of auxiliary devices, given their impact on calibration accuracy. In the random averaging method, random ball can give rise to additional wavefront aberrations due to misalignment and numerical aperture mismatch. To mitigate these aberrations and enhance the accuracy of systematic error calibration, this paper introduces a random ball residual compensation (RBRC) model. Additionally, when combined with the random averaging technique, it elevates the calibration accuracy of the measured lens’s wavefront aberrations. The experimental results underscore the method’s effectiveness, accurately determining optical component eccentricities and numerical aperture errors. After eliminating these errors, more accurate values of lens wavefront aberrations are achieved. This research significantly contributes to enhancing error calibration of lithography objective lens systems.

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Section: Introductionmentioning

confidence: 99%

“…These external factors can lead to deviations in the optical elements, causing them to deviate from their ideal positions. Such deviations can have a detrimental effect on the performance of the optical system, subsequently affecting imaging quality and precision [19][20][21].…”

Section: Introductionmentioning

confidence: 99%