2014
DOI: 10.1109/led.2013.2290602
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Analytical Theory for Extracting Specific Contact Resistances of Thick Samples From the Transmission Line Method

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Cited by 44 publications
(28 citation statements)
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“…The sheet resistance of TCO layers is determined by 4‐probe measurement. The TCO/Ag specific contact resistance ( ρ TCO/Ag ) is measured on a TLM structure . R TCO , R metallization , and R TCO/Ag are then calculated based on the unit cell approach .…”
Section: Resultsmentioning
confidence: 99%
“…The sheet resistance of TCO layers is determined by 4‐probe measurement. The TCO/Ag specific contact resistance ( ρ TCO/Ag ) is measured on a TLM structure . R TCO , R metallization , and R TCO/Ag are then calculated based on the unit cell approach .…”
Section: Resultsmentioning
confidence: 99%
“…The results of the TLM measurements performed on the TLM strips are shown in Figure . Please note that due to the sample structure, the determined ρ C values represent upper limits . The Ag paste used is capable of contacting the laser‐processed and p‐doped areas with 1.0 mΩ cm 2 ≤ ρ C ≤ 2.2 mΩ cm 2 for setting 1 and with 1.4 mΩ cm 2 ≤ ρ C ≤ 7.8 mΩ cm 2 for setting 2.…”
Section: Resultsmentioning
confidence: 99%
“…Please note that due to the sample structure, the determined ρ C values represent upper limits. [29] The Ag paste used is capable of contacting the laser-processed and p-doped areas with 1.0 mΩ cm 2 ρ C 2.2 mΩ cm 2 for setting 1 and with 1.4 mΩ cm 2 ρ C 7.8 mΩ cm 2 for setting 2. For setting 1, P laser has no significant impact on the measured ρ C while for setting 2, ρ C increases with increasing P laser .…”
Section: Resultsmentioning
confidence: 99%
“…A TLM evaluation method was recently proposed, considering a thick sample. 33 The second dimension of the thickness is accounted for in an analytical solution to derive R C,TLM2D for planar contacts. R C,TLM2D % R C-base is 1.16 X assuming q base ¼ 2 X cm, W ¼ 150 lm, a ¼ 50 lm, and q C ¼ 1 Â 10 À6 mX cm 2 .…”
Section: B Evaluation Of R C By the Tlm Methodsmentioning
confidence: 99%