Analyzing the Impact of Phase Errors in Quadrature Cancellation Techniques for MEMS Capacitive Gyroscopes

Omar, A.; Elshennawy, A.; Abdelazim, Mohamed; Ismail, A.

doi:10.1109/icsens.2018.8589776

Cited by 9 publications

(5 citation statements)

References 3 publications

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“…Apparently, to reduce the impact of the phase noise, we need to diminish the non-ideal factors in the mechanical structural aspect. From a circuit design aspect, we can use accurate phase adjustment technology between the modulation signal and demodulated signal to diminish

item [ 47 , 48 ]. However, the structure parameters are changed with environmental factors and

may change dramatically.…”

Section: The Influence Of Time-varying Phase Noise On the Mems Drgmentioning

confidence: 99%

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Zhang

Chen

Yin

et al. 2020

Sensors

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In this paper, a detailed analysis of the influence of phase noise on the micro-electro-mechanical system (MEMS) disk resonator gyroscope (DRG) is presented. Firstly, a new time-varying phase noise model for the gyroscope is established, which explains how the drive loop circuit noise converts into phase noise. Different from previous works, the time-varying phase noise model in this paper is established in mechanical domain, which gain more physical insight into the origin of the phase noise in gyroscope. Furthermore, the impact of phase noise on DRG is derived, which shows how the phase noise affects angular velocity measurement. The analysis shows that, in MEMS DRG, the phase noise, together with other non-ideal factors such as direct excitation of secondary resonator, may cause a low frequency noise in the output of the gyroscope system and affect the bias stability of the gyroscope. Finally, numerical simulations and experiment tests are designed to prove the theories above.

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item [ 47 , 48 ]. However, the structure parameters are changed with environmental factors and

may change dramatically.…”

Section: The Influence Of Time-varying Phase Noise On the Mems Drgmentioning

confidence: 99%

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Zhang

Chen

Yin

et al. 2020

Sensors

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“…However, because CMGs are manufactured with Si-based materials of temperature dependence, temperature must change the physical properties of Si-based materials, which introduces Temperature Drift Error (TDE) to reduce CMG’s bias stability and limits their applications in some fields [ 5 ]. Intrinsically, optimizing the production process of Si-based materials to decouple their temperature dependence is the fundamental way to eliminate TDE [ 6 ]. Due to current material process limitations, it is so hard to decouple temperature dependence in the present technological context.…”

Section: Introductionmentioning

confidence: 99%

A Novel Temperature Drift Error Estimation Model for Capacitive MEMS Gyros Using Thermal Stress Deformation Analysis

Qi,

Cheng,

Wang

et al. 2024

Micromachines

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Because the conventional Temperature Drift Error (TDE) estimation model for Capacitive MEMS Gyros (CMGs) has inadequate Temperature Correlated Quantities (TCQs) and inaccurate parameter identification to improve their bias stability, its novel model based on thermal stress deformation analysis is presented. Firstly, the TDE of the CMG is traced precisely by analyzing its structural deformation under thermal stress, and more key decisive TCQs are explored, including ambient temperature variation ∆T and its square ∆T2, as well its square root ∆T1/2; then, a novel TDE estimation model is established. Secondly, a Radial Basis Function Neural Network (RBFNN) is applied to identify its parameter accurately, which eliminates local optimums of the conventional model based on a Back-Propagation Neural Network (BPNN) to improve bias stability. By analyzing heat conduction between CMGs and the thermal chamber with heat flux analysis, proper temperature control intervals and reasonable temperature control periods are obtained to form a TDE precise test method to avoid time-consuming and expensive experiments. The novel model is implemented with an adequate TCQ and RBFNN, and the Mean Square Deviation (MSD) is introduced to evaluate its performance. Finally, the conventional model and novel model are compared with bias stability. Compared with the conventional model, the novel one improves CMG’s bias stability by 15% evenly. It estimates TDE more precisely to decouple Si-based materials’ temperature dependence effectively, and CMG’s environmental adaptability is enhanced to widen its application under complex conditions.

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“…However, this technique is sensitive to phase error for these two channels. Besides, its effectiveness is greatly limited by the stability and accuracy of the phase relationship between the demodulation and the sense signal [ 20 , 21 ]. It was proved that open-loop detection and different phase compensation methods can effectively compensate the errors caused by circuit phase delay, but they are inapplicable to most gyroscope control circuits [ 11 , 13 ].…”

Section: Introductionmentioning

confidence: 99%

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

Wei

Guo

et al. 2021

Micromachines

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With the development of the designing and manufacturing level for micro-electromechanical system (MEMS) gyroscopes, the control circuit system has become a key point to determine their internal performance. Nevertheless, the phase delay of electronic components may result in some serious hazards. This study described a real-time circuit phase delay correction system for MEMS vibratory gyroscopes. A detailed theoretical analysis was provided to clarify the influence of circuit phase delay on the in-phase and quadrature (IQ) coupling characteristics and the zero-rate output (ZRO) utilizing a force-to-rebalance (FTR) closed-loop detection and quadrature correction system. By deducing the relationship between the amplitude-frequency, the phase-frequency of the MEMS gyroscope, and the phase relationship of the whole control loop, a real-time correction system was proposed to automatically adjust the phase reference value of the phase-locked loop (PLL) and thus compensate for the real-time circuit phase delay. The experimental results showed that the correction system can accurately measure and compensate the circuit phase delay in real time. Furthermore, the unwanted IQ coupling can be eliminated and the ZRO was decreased by 755% to 0.095°/s. This correction system realized a small angle random walk of 0.978°/√h and a low bias instability of 9.458°/h together with a scale factor nonlinearity of 255 ppm at room temperature. The thermal drift of the ZRO was reduced to 0.0034°/s/°C at a temperature range from −20 to 70 °C.

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Analyzing the Impact of Phase Errors in Quadrature Cancellation Techniques for MEMS Capacitive Gyroscopes

Cited by 9 publications

References 3 publications

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit

A Novel Temperature Drift Error Estimation Model for Capacitive MEMS Gyros Using Thermal Stress Deformation Analysis

A Real-Time Circuit Phase Delay Correction System for MEMS Vibratory Gyroscopes

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