INTRODUCTION A variety of methods like chemical and physical deposition namely sputtering, pulse laser deposition and so on are used in the preparation of ZnO thin films 1 . Chemical techniques involving aqueous route are much cheaper. In order more commercially pure ZnO films must be prepared by a low temperature deposition technique. A low temperature deposition technology for the growth of ZnO films becomes mandatory because of this reason 2 . Instead of atoms, the basic building blocks are ions in the synthesis of thin films, where the preparative parameters are under control. ZnO thin films are deposited using a SILAR method, which is done by alternate dipping of substrate in the solution and hot deionised water. This method is mainly based on the adsorption and reaction of the ions from the solution and rinsing between every immersion with deionised water to avoid homogeneous precipitation in the solution 3 . The thin films can be grown on copper, silicon and glass substrates. The pros of SILAR technique are fruitfulness and unsophistication of the deposition equipment, controlled deposition rates, wide spectrum of deposition parameters for the control and the optimization of film properties, and film thickness. The process can be carried out on any base of substrate on which an organism does not require high quality target and vacuum at any stage. The thickness and deposition rate is balanced by changing the number of deposition cycles, and it is a low temperature chemical solution method and does not cause local over heating that can be adverse for materials to be deposited 4 . ZnO nanoparticles showcase attractive antibacterial properties due to increased specific surface area as the reduced particle size leading to enhanced particle surface reactivity. ZnO is a bio-safe material that consists of photo-oxidizing and photo catalysis influence on chemical and biological species. ZnO nanoparticles are said to be a non-toxic to human cells in lot of studies. 5 . That is why it is used as an antibacterial agent, noxious to microorganisms, and hold good biocompatibility to human cells 6 . The various antibacterial mechanisms of nanomaterials are mostly due to their high specific surface area-to-volume ratios 7 , and their distinctive physico-chemical properties. However, the exert mechanisms are yet under debate, although several proposed ones are in choice and adopted. In the present analysis, ZnO thin films are deposited on glass substrate by SILAR technique and the films are post annealed at 250°C, 350°C and 450°C. Optical and Structural properties were analyzed using UV-Visible spectrometer, XRD, EDAX and FESEM. The Antibacterial and antifungal activities were assessed for all the three annealed thin films.