Angular‐dependent energy distributions for backscattered electrons—Calculation of the surface ionization

Andrae, Michael; Rührbacher, K.; Klein, Peter; Rnisch, J. W.

doi:10.1002/sca.1996.4950180602

Cited by 5 publications

(3 citation statements)

References 18 publications

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“…The effective mass thickness is defined as this thickness of the virtual layer, where the considered physical quantity has the same value as the real layer. This can be expressed as follows: Andrae et al (1996b). A transmission law which is also valid for tilted specimens is applied (Andrae et al 1996a).…”

Section: Correction Proceduresmentioning

confidence: 99%

“…where θ MP is the most probable angle of transmitted electrons; W MP is the most probable energy of transmitted electrons; τ is the transmission coefficient; EFFθ, EFFW,EFFτ are effective mass thicknesses of θ MP , W MP , and τ [g/cm 2 ], respectively; Z 1 , A 1 /Z 2 , A 2 are the atomic number and atomic mass of layer/substrate, respectively; and ρd is the mass thickness of layer [g/cm 2 ]. An expression for θ MP and W MP was published by Andrae et al (1996b). A transmission law which is also valid for tilted specimens is applied (Andrae et al 1996a).…”

Section: Correction Proceduresmentioning

confidence: 99%

“…where Andrae et al (1996b). A transmission law which is also valid for tilted specimens is applied (Andrae et al 1996a).…”

Section: Correction Proceduresmentioning

confidence: 99%

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Calculation of concentration depth profiles in electron probe microanalysis

et al. 1997

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Summary: Based on a multiple reflection model, the concentration depth profiles of gold diffused into a silver substrate are determined. To conclude the structure of the sample from the measured intensity of radiation, an accurate correction procedure is necessary. A new model was developed for this purpose. Since the new electron probe microanalysis (EPMA) correction procedure is also valid for tilted samples, measurements with different geometries could be performed. The different angles of incidence and take-off angles allow for a better comparison of theory with experiment. One advantage of the applied multiple reflection model is that it can be extended comparatively easily with the analysis of layered specimens. Measurements of some specimens with one layer on a substrate are reported. The mean deviation of calculated thicknesses is about 10%. To calculate depth profiles, gold was evaporated with physical vapor deposition on silver foils. The thicknesses of evaporated gold films were 50 and 100 nm. Then the specimens were annealed at a temperature of approximately 400°C. Finally, the concentration depth profiles were quantified with EPMA. The shape of the profiles was derived from a simple diffusion model valid for the samples under consideration. To check the shape of the functions obtained, a comparison with measurements by secondary ion mass spectrometry was performed.

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Section: Correction Proceduresmentioning

confidence: 99%

Section: Correction Proceduresmentioning

confidence: 99%