Hard x-ray spectra (10–100 keV) created in high contrast, 400 fs, laser pulse interaction with solid targets, have been studied for laser intensities in the 1017–1019 W/cm2 range. The target atomic numbers (Z) extended from Z=13 to Z=73. The measured conversion efficiency at Ag Kα emission line was 10−3% at 5×1018 W/cm2. It has been confirmed that the hot electron temperature increased as (Iλ2)1/3 and the fraction of laser energy in hot electrons follows scaling law of (Iλ2)3/4.