2010
DOI: 10.1016/j.colsurfa.2010.08.043
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Anionic surfactants for defect suppression in 193-nm lithography—Study of the adsorption process by ellipsometry and streaming potential measurements

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Cited by 3 publications
(2 citation statements)
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“…Nanoelectronics has become a transformative technology for both industrial and personal computing applications, yet the limitations of traditional manufacturing methods make current prototypes expensive and difficult to mass produce 1 . Nanowires produced by common lithographic techniques requiring pattern transfer and vapor deposition suffer from high resource cost, population heterogeneity, lack of structural precision, and difficulty of construction 28 . Consequently, conventional nanowire synthesis often requires prohibitively complex and expensive manufacturing infrastructure.…”
Section: Introductionmentioning
confidence: 99%
“…Nanoelectronics has become a transformative technology for both industrial and personal computing applications, yet the limitations of traditional manufacturing methods make current prototypes expensive and difficult to mass produce 1 . Nanowires produced by common lithographic techniques requiring pattern transfer and vapor deposition suffer from high resource cost, population heterogeneity, lack of structural precision, and difficulty of construction 28 . Consequently, conventional nanowire synthesis often requires prohibitively complex and expensive manufacturing infrastructure.…”
Section: Introductionmentioning
confidence: 99%
“…Electrolytes in aqueous solutions are ubiquitous in natural and engineering systems and ion adsorption may also change adhesion and interfacial tension. We studied the effect of different solutes in aqueous solutions on advancing and receding contact angles by the application of -solid polymers without ionizable functional surface groups in aqueous electrolyte solutions of different ion concentrations and pH [22] -copolymer films containing ionizable functional surface groups in aqueous electrolyte solutions of different ion concentrations and pH [23] -fluorohydrocarbon polymer films in phosphate buffered saline containing plasma proteins (albumin, fibrinogen) [24] -photoresist surfaces in cationic and anionic aqueous surfactant solutions [25][26][27][28][29].…”
Section: Introductionmentioning
confidence: 99%