Annealing effect of platinum-incorporated nanowires created by focused ion/electron-beam-induced deposition

Fang, Jinghua; Qin, Shiqiao; Zhang, Xueao; Liu, Dongqing; Chang, Shengli

doi:10.1088/1674-1056/23/8/088111

Cited by 11 publications

(7 citation statements)

References 20 publications

(17 reference statements)

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“…% . Additionally, several groups have explored subsequent coating processes, such as post-electron beam-induced curing, ,− co-deposition with purification gases, , beam-induced post-purification with oxidizing − and reducing precursors, post-deposition annealing, ,,− and synchronized pulsed laser FEBID, , with all aimed at improving material properties without sacrificing the nanoscale 3D direct-write attributes that make the process attractive.…”

Section: Introductionmentioning

confidence: 99%

Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Lasseter

Rack

Randolph

2022

ACS Appl. Nano Mater.

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We report that selected area deposition of 3D nanostructures is induced via a pyrolytic laser chemical vapor deposition (CVD) process where selected area heating results from the unique photothermal transport regime that is intrinsic to 3D nanostructures. PtC x composite nanostructures were deposited by focused electron beam-induced deposition (FEBID) and used as 3D templates. Subsequent simultaneous localized delivery of an organometallic PtC x precursor and pulsed 915 nm laser irradiation to the pre-defined nanostructures results in selected area deposition on the FEBID features. Results indicate the ability to initiate the process on sub-diffraction-limit nanoscale features. To elucidate the mechanisms that are operative in the selected area deposition, we analyze the effects of the laser repetition rate, power, and pulse duration. Thermal simulations corroborate that the pseudo-1D thermal transport of the nanostructure geometry coupled with the optical and thermal properties of the nanostructure governs the CVD reaction. The results demonstrated here suggest that controlling the thermal transport in nanomaterial architectures could be a useful means to spatially control localized photothermally stimulated chemical reactions and induce selected area reactions.

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Section: Introductionmentioning

confidence: 99%

Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Lasseter

Rack

Randolph

2022

ACS Appl. Nano Mater.

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“…Given the dielectric nature of amorphous carbon, post-fabrication processes have been employed to improve the conductivity of as-deposited EBID structures. [6][7][8] With annealing, for instance, the size of the beam-deposited metal nanoparticles increases and the amorphous carbon is either crystalized or removed from the structure 9 . In most cases, an oxygen atmosphere is used to etch the amorphous carbon matrix.…”

Section: Introductionmentioning

confidence: 99%

“…In most cases, an oxygen atmosphere is used to etch the amorphous carbon matrix. [9][10] Unfortunately, this process may result in the onset of structural voids and it is not applicable to carbon-based devices. 10 As early as 1996, IBID of W was employed in electrical transport studies of discrete CNTs.…”

Section: Introductionmentioning

confidence: 99%

Structural changes of electron and ion beam-deposited contacts in annealed carbon-based electrical devices

et al. 2015

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The use of electron and ion beam deposition to make devices containing discrete nanostructures as interconnectors is a well-known nanofabrication process. Classically, onedimensional materials such as carbon nanotubes (CNT) have been electrically characterized by resorting to these beam deposition methods. While much attention has been given to the interconnectors, less is known about the contacting electrodes (or leads). In particular, the structure and chemistry of the electrode-interconnector interface is a topic that deserves more attention as it is critical to understand the device behavior. Here, the structure and chemistry of Pt electrodes, deposited either with electron or ion beams and contacted to a CNT, are analyzed before and after thermally annealing the device in vacuum. Free-standing Pt nanorods, acting as beam-deposited electrode models, are also characterized pre-and postannealing. Overall, the as-deposited leads contain a non-negligible amount of amorphous carbon that is consolidated, upon heating, as a partially graphitized outer shell enveloping a Pt core. This observation raises pertinent questions regarding the definition of electrodesnanostructure interfaces in electrical devices, in particular long-standing assumptions of metal-CNT contacts fabricated by direct beam deposition methods.

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“…However, the resistance dropped to 1 GΩ upon thermal exposure, confirming the presence of oversprayed Pt connectivity between the adjacent Pt lines. The change in resistance may be attributed to the removal of carbon impurities or/and crystallization of carbon and Pt in the over-deposits [41]. With further reduction in the line spacing up to 50 nm, the resistance consistently decreased, particularly in the annealed samples.…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of MWCNT-Based Bridge Devices

Chappanda

Batra

Holguín‐Lerma

et al. 2017

IEEE Trans. Nanotechnology

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Abstract-Carbon nanotubes (CNTs) are one of the most actively researched structural materials due to their interesting electrical, mechanical, and chemical properties. Unlike single walled carbon nanotubes (SWCNTs), little work has been focused on multi-walled carbon nanotubes (MWCNTs) and their potential for practical devices. Here, we have fabricated bridgeshape devices integrating MWCNTs (> 50 nm in outer diameter) using three processes: optical lithography, electron beam-induced platinum deposition, and surface micromachining. Each device consists of a doubly-clamped nanotube suspended over gold electrodes on a highly conductive Si substrate. The suspended nanotubes are characterized individually using Raman spectroscopy and semiconductor parameters analysis and, overall, show, high crystallinity and low electrical resistance. The spring constants of doubly-clamped nanotubes were characterized using atomic force microscopy force−displacement measurements, with values as high as 70 N/m observed. Highly stiff MWCNTs are promising for a variety of applications, such as resonators and electrical interconnects. Through simulations, we estimate the resonance frequencies and pull-in voltages of these suspended nano-structures. The dependence of key parameters, such as the nanotube's length, Young's modulus, axial stress, and wall thickness is also discussed.

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Annealing effect of platinum-incorporated nanowires created by focused ion/electron-beam-induced deposition

Cited by 11 publications

References 20 publications

Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Structural changes of electron and ion beam-deposited contacts in annealed carbon-based electrical devices

Fabrication and Characterization of MWCNT-Based Bridge Devices

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Annealing effect of platinum-incorporated nanowires created by focused ion/electron-beam-induced deposition

Cited by 11 publications

References 20 publications

Selected Area Deposition of PtCx Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Selected Area Deposition of PtCx Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Structural changes of electron and ion beam-deposited contacts in annealed carbon-based electrical devices

Fabrication and Characterization of MWCNT-Based Bridge Devices

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Product

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Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures

Selected Area Deposition of PtC_x Nanostructures: Implications for Functional Coatings of 3D Nanoarchitectures