2018
DOI: 10.1149/2.0201805jss
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Annealing Time Effect on Metal Graphene Contact Properties

Abstract: Annealing is well known technique to improve metal contacts. In order to anneal metal/graphene contacts information of suitable time of thermal treatment process is required, otherwise in a long annealing process undesired deformation in graphene layer or electronic device can be induced. In this article we introduce the investigation of the annealing time of metal/graphene structure. Electrical properties of contact between CVD grown graphene and metal (Au and Ni), using circular transmission line model (CTLM… Show more

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Cited by 8 publications
(9 citation statements)
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“…The sizes of the Ni contacts in this study were relatively large in comparison to those that are commonly used for the contact resistance measurement [2][3][4][5][6][9][10][11]. However, it is worth noting that, in our experiment, we measured the same position several times.…”
Section: Discussionmentioning
confidence: 95%
See 1 more Smart Citation
“…The sizes of the Ni contacts in this study were relatively large in comparison to those that are commonly used for the contact resistance measurement [2][3][4][5][6][9][10][11]. However, it is worth noting that, in our experiment, we measured the same position several times.…”
Section: Discussionmentioning
confidence: 95%
“…Among these metals, nickel has especially proven to have great potential, since it creates a good contact with graphene due to the chemisorption mechanism [8]. Furthermore, the thermal annealing of samples has been shown to enhance the electric contact between nickel and graphene [9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…We have used the technique proposed by Kang et al [13]. The conditions of the wet chemical processes and poly(methyl methacrylate) (PMMA) transfer on substrate were adapted to the fabrication process of the samples in our previous work [14].…”
Section: Materials and Preparationmentioning
confidence: 99%
“…It was demonstrated in our previous work [14] that graphene based resistors must be annealed after the formation of electronic devices. The results demonstrating changes in the total resistance, contact whereas, for the samples with Ni contacts, the R d (t)/ R d (t 0 ) ratio decreased from 1 to 0.65.…”
Section: Electric Measurementsmentioning
confidence: 99%
“…On the other hand, rGO alone does not show any temperature-dependent resistivity changes upon annealing treatments in the same conditions as for rGO PtPA 90. The slight change in the value of the resistivity can be ascribed to an improvement of the electrode–rGO interface upon annealing, which is independent from the rGO electrical characteristics. , This data, combined with no changes in C/O ratios (as measured by XPS, Figure S4 and Table S2) nor in sheet resistance (measured by a four-point probe, Figure a), rules out that the improvement in rGO PtPA 90 electrical characteristics is caused by further reduction of the rGO component, which does not take place upon thermal treatment in the conditions used for rGO-PtPA materials.…”
Section: Results and Discussionmentioning
confidence: 80%