Anodically bonded submicron microfluidic chambers

Abstract

We demonstrate the use of anodic bonding to fabricate cells with characteristic size as large as 7 x 10 mm(2), with height of approximately 640 nm, and without any internal support structure. The cells were fabricated from Hoya SD-2 glass and silicon wafers, each with 3 mm thickness to maintain dimensional stability under internal pressure. Bonding was carried out at 350 degrees C and 450 V with an electrode structure that excluded the electric field from the open region. We detail fabrication and characterization steps and also discuss the design of the fill line for access to the cavity.

Quantum Transport in MesoscopicHe3Films: Experimental Study of the Interference of Bulk and Boundary Scattering

“…2b). The height-height autocorrelation function, ζ(∆x, ∆y), is calculated as detailed in [14]. The result, with ∆r = (∆x) 2 + (∆y) 2 to account for surface statistical isotropy, is shown in Fig.…”

“…(3). predicted values for various surface roughness profiles for a highly confined structure such as that encountered in [14] but with engineered mesoscale roughness.…”

Realizing quantum materials with Helium: Helium films at ultralow temperatures, from strongly correlated atomically layered films to topological superfluidity

“…The first generation of cells (fabricated by anodically bonding Hoya SD-2 glass and Silicon) [102], were of typical area 1 cm 2 , with a cavity height of 700 nm. We subsequently developed all-silicon structures, direct wafer bonded, with cavity heights (in the range 50 to 300 nm) precisely defined by an array of posts, and modelled successfully by finite-element techniques.…”

Study of Superfluid $$^3$$ 3 He Under Nanoscale Confinement

“…The first generation of sample cells were fabricated from glass (Hoya SD-2) and silicon wafers, anodically bonded together [46]. The unsupported cavity was defined lithographically in the silicon wafer, and characterised by a profilometer scan.…”