Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing

Abstract

This paper details study of the anti-symmetric response to the symmetrical electrostatic excitation of a Micro-electro-mechanical-systems (MEMS) resonant mass sensor. Under higher order mode excitation, two nonlinear coupled flexural modes to describe MEMS mass sensors are obtained by using Hamilton’s principle and Galerkin method. Static analysis is introduced to investigate the effect of added mass on the natural frequency of the resonant sensor. Then, the perturbation method is applied to determine the response and stability of the system for small amplitude vibration. Through bifurcation analysis, the physical conditions of the anti-symmetric mode vibration are obtained. The corresponding stability analysis is carried out. Results show that the added mass can change the bifurcation behaviors of the anti-symmetric mode and affect the voltage and frequency of the bifurcation jump point. Typically, we propose a mass parameter identification method based on the dynamic jump motion of the anti-symmetric mode. Numerical studies are introduced to verify the validity of mass detection method. Finally, the influence of physical parameters on the sensitivity of mass sensor is analyzed. It is found that the DC voltage and mass adsorption position are critical to the sensitivity of the sensor. The results of this paper can be potentially useful in nonlinear mass sensors.

Desain sensor massa resonator MEMS menggunakan struktur free-free beam

“…Penelitian untuk meningkatkan performa akselerometer melalui investigasi mekanisme penginderaan baru juga telah dilakukan melalui pendekatan peningkatan berbasis osilator yang disinkronkan untuk meningkatkan resolusi sebanyak 5x lipat dari akselerometer resonansi mikroelektromekanis [9]. Resonator MEMS juga diaplikasikan untuk penginderaan massa contohnya dengan menggunakan struktur mikrokantilever yang digerakkan secara piezoelektrik [10,11], struktur kopel kantilevel yang diaktuasi secara elektrostatik [12], struktur jepit tunggal (single-clamped) [13], dan struktur jepit dobel (clamped-clamped) [14]. Pada penelitian ini, resonator MEMS akan didesain untuk penginderaan massa dengan menggunakan struktur free-free beam.…”

A Novel Frequency Stabilization Approach for Mass Detection in Nonlinear Mechanically Coupled Resonant Sensors

“…Kilinc et al [ 20 ] designed a nanoarray coupling resonant structure and obtained complex coupling resonance behavior by adjusting the coupling stiffness between different resonators. Li et al [ 21 ] presented coupled vibration behavior between second-order and third-order modes caused by the axial stress, which can be used to realize high precision parameter identification by an antisymmetric mode. In addition, weakly coupled nonlinear MEMS resonators can lead to mode localization, which can greatly improve the sensitivity of the sensor [ 22 ].…”

Ultra-Precise MEMS Based Bio-Sensors

“…In the past few years, in the MEMS community, a paradigm shift is observed in the design and implementation of micromechanical resonating sensors. A new perspective is presented in using 1-d chain of a coupled resonating proof masses, more familiarly refereed as multi degree-of-freedom (m-DoF) array, coupled resonator (CR) array, weakly coupled resonators (WCR) or mode-localized sensors [20][21][22][23][24][25][26][27][28]. Figure 1 shows a representative schematic for such system.…”