2017
DOI: 10.1002/pssa.201600882
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Applicability of an economic diode laser emitting at 980 nm for preparation of polycrystalline silicon thin film solar cells on glass

Abstract: Recently, polycrystalline silicon thin film solar cells on glass are fabricated by a laser induced liquid phase crystallization (LPC) process. This study compares a new economic diode laser, emitting a line focus at 980 nm, with the 808 nm laser normally used concerning its absorption during LPC. We measured the optical constants of amorphous silicon by spectral ellipsometry and UV/VIS spectroscopy. Together with the literature data for crystalline and liquid silicon combined with numerical temperature simulat… Show more

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Cited by 10 publications
(6 citation statements)
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“…The thickness of the wafer is 170 ± 10 μm. In this work, we use a diode laser working at a wavelength of 808 nm, which is commonly used to crystallize Si thin films on glass [19]. It is possible to melt the whole piece of the pc-Si wafer fully from the front to the back side, and a substrate temperature of 600°C was used to reduce the thermal stress during the solidification.…”
Section: Resultsmentioning
confidence: 99%
“…The thickness of the wafer is 170 ± 10 μm. In this work, we use a diode laser working at a wavelength of 808 nm, which is commonly used to crystallize Si thin films on glass [19]. It is possible to melt the whole piece of the pc-Si wafer fully from the front to the back side, and a substrate temperature of 600°C was used to reduce the thermal stress during the solidification.…”
Section: Resultsmentioning
confidence: 99%
“…An 80 nm silicon nitride (SiN x ) layer was deposited on the glass as barrier layer, followed by electron‐beam evaporation of phosphorus‐doped silicon (6.8 μm). Subsequently, this material was recrystallized by scanning it with a continuous‐wave diode laser at 808 nm, resulting in an n‐type multicrystalline silicon with donor density of 1.5 × 10 17 cm −3 . Based on these substrates, the solar cells were fabricated following the fabrication process shown in Figure a.…”
Section: Methodsmentioning
confidence: 99%
“…Thus, we also conducted the experiments at this wavelength. The meta-mirror consists of a structured layer of amorphous silicon [36] on a fused silica substrate, see Fig. 2 (c).…”
Section: A Design Of the Low-noise Meta-mirrormentioning
confidence: 99%