Application of environmental electron spectroscopy to AES of bulk ceramics

Abstract

Auger spectra from highly insulating samples (AI,O, , Si,N,) are collected in a gaseous environment. It is demonstrated that the build-up of negative surface charge can be reduced considerably under suitable conditions. It is proposed that the decharging of the surface is initiated by Auger neutralization of the ions formed in the gaseous environment in coUisioas with the primary keV electrons.

Charging Phenomena and Charge Compensation in AES on Metal Oxides and Silica

“…These Ðndings agree with those reported by Ohlendorf et al 6 At primary energies O3 keV, which introduce stronger damage at the surface than higher primary energies, an oxygen deÐciency and carbon contamination could not be avoided and some charging appeared occasionally.…”

“…6. The central electron gun in the cylindrical mirror analyser (CMA) provided a stable electron beam with a primary energy up to 8 keV.…”

“…It was not mentioned whether these methods are applicable for long-term irradiation, because on some insulating materials, such as crystalline Al 2 O 3 , charging normally appears after many hours of irradiation. 5 Ohlendorf et al 6 have applied Environmental Electron Spectroscopy to AES of bulk ceramics : the specimen under study is held in a controlled gaseous environment. At relatively high pressures a sufficiently large number of gas molecules are ionized by the primary and secondary electrons.…”

Charge trapping and charge compensation during Auger electron spectroscopy on SiO2

“…The system has been described in detail previously. 8,9 The integrated electron gun is applied for sample excitation, as well as for damaging and a͒ Author to whom correspondence should be addressed; electronic mail: weipengl@bjpu.edu.cn charging the sample. The primary current density at the applied angles of incidence ␣ ͑with respect to the specimen normal͒ varies with the primary energy (E p ) as indicated in Table I.…”