Abstract:Glow discharge optical emission spectroscopy (GDOS) is a method to analyse the optical emission of elements during sputtering of a solid, providing data on the light intensities of the elements YS. the sputtering time. By correcting the measured light intensities with standard samples, it is possible to obtain the quantitative depth profile up to about 100 pm. In the present research, GDOS was applied to the diffusion measurement of impurity atoms in metals and alloys. After a thin film of copper was coated on… Show more
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