2009
DOI: 10.1016/j.matlet.2009.07.037
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Application of nano-cutting for mechanical characterization of materials

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Cited by 20 publications
(21 citation statements)
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“…A mirror-polished SUS 304 substrate was coated with a SiCN film with a thickness of about 280 nm. The adhesion strength and film structure of a SiCN film with a thickness of about 100 nm deposited on Si(100) were measured by surface-interface physical property analysis equipment (DAIPLA WINTES Corp., SAICAS BN-1) [10,11] and determined using Fourier transform infrared (FTIR) spectroscopy, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…A mirror-polished SUS 304 substrate was coated with a SiCN film with a thickness of about 280 nm. The adhesion strength and film structure of a SiCN film with a thickness of about 100 nm deposited on Si(100) were measured by surface-interface physical property analysis equipment (DAIPLA WINTES Corp., SAICAS BN-1) [10,11] and determined using Fourier transform infrared (FTIR) spectroscopy, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…22) Figure 2 shows the schematic image of the measurement mechanism. SAICAS can provide peeling strength, shear strength of a thin film by slicing the sample with a diamond cutting tool, applying constant vertical and horizontal force.…”
Section: Methodsmentioning
confidence: 99%
“…The crystal structure of the coatings was analyzed with an X-ray diffractometer (XRD; Rigaku RINT 2500) using BraggBrentano geometry with Cu Ka radiation, and the spectra were assigned using the materials database (NIMS; Atom Work) [10]. Adhesion strength between the ZnO coatings and type-304 steel substrates, and shear strength of the coatings were measured by SAICAS TM (Surface And Interfacial Cutting Analysis System: Daipla Wintes Co.) [11]. During the cutting process of the coatings by a single crystal diamond blade, vertical and horizontal forces were monitored.…”
Section: Methodsmentioning
confidence: 99%