Application of precision diamond machining to the manufacture of microphotonics components

Davies, Matthew A.; Evans, Christopher J.; Vohra, Rashmi R.; Bergner, Brent C.; Patterson, Steven R.

doi:10.1117/12.506373

Cited by 89 publications

(48 citation statements)

References 15 publications

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“…Using this equation, we find that 3 nm surface roughness results in a scattering loss of less than 1.5% at normal incidence for wavelengths above 300 nm. Typically, a precision-quality diamond turned metallic mirror has a surface roughness of 5 nm 17 .…”

Section: Printing and Surface Smoothingmentioning

confidence: 99%

3D printed optics with nanometer scale surface roughness

Vaidya

Solgaard

2018

Microsyst Nanoeng

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Complex optical devices including aspherical focusing mirrors, solar concentrator arrays, and immersion lenses were 3D printed using commercial technology and experimentally demonstrated by evaluating surface roughness and shape. The as-printed surfaces had surface roughness on the order of tens of microns. To improve this unacceptable surface quality for creating optics, a polymer smoothing technique was developed. Atomic force microscopy and optical profilometry showed that the smoothing technique reduced the surface roughness to a few nanometers, consistent with the requirements of high-quality optics, while tests of optical functionality demonstrated that the overall shapes were maintained so that near theoretically predicted operation was achieved. The optical surface smoothing technique is a promising approach towards using 3D printing as a flexible tool for prototyping and fabrication of miniaturized high-quality optics.

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Section: Printing and Surface Smoothingmentioning

confidence: 99%

3D printed optics with nanometer scale surface roughness

Vaidya

Solgaard

2018

Microsyst Nanoeng

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“…超精密工作機械用のスピンドルや直動テーブルに要求される運動精度は，ますます高くなっている (Davies, et al, 2003)．直動テーブルについて考えると，その運動精度に影響する因子としては，案内面の形状誤差，駆動機構に起因して発生する様々な運動誤差や振動，発熱による装置各部の変形などが考えられる．ところで，近年，超精密加工の需要が多いのがレンズやレンズ用金型などに代表される，光学部品関連の加工である．この場合，特に小型部品の加工需要が多いため，小型の超精密工作機械が適している．小型工作機械に関しては，これまでにも研究事例が報告 (Okazaki, et al, 2004) and Yusuke TORII *4 *1, *4 Kanagawa University. Dept.…”

Section: 緒言unclassified

Development and speed control of water driven stage

Nakao

Suzuki

Sano

et al. 2014

Transactions of the JSME (In Japanese)

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Water driven stage is developed as a linear stage of the ultra-precision machine tool, especially, that is intentionally designed for the machining of small parts in size, such as optical mirrors and lenses. The water driven stage is mainly composed of a body of the stage and a table. The table is supported by water hydrostatic bearings and is driven by water hydraulic cylinder. Speed of the stage, determining the feed rate of the diamond turning, can be controlled by the flow rate into the water hydraulic cylinder. The paper deals with speed control of the stage. Mathematical models of the water driven stage and the proportional flow control valve are derived in order to design feedback control system. Performances of the designed feedback control system are verified via experiments and simulations. It is then verified that the steady state error is less than 0.5%.Step responses of the control system with a step input of the external load acting on the table are also tested, showing validity of the designed control system.

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“…We present our recent technological achievements in development of the nano-machining [1] of active X-ray crystal optics surfaces. This technique uses a single crystal diamond tool with extremely precise and temperature stabilized positioning system.…”

Section: Introductionmentioning

confidence: 99%

Nano-machining for advanced X-ray crystal optics

Zápražný¹,

Korytár²,

Jergel³

et al. 2016

AIP Conference Proceedings

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Abstract. We present our recent technological achievements in development of the nano-machining of active X-ray crystal optics surfaces. This technique uses a single crystal diamond tool with extremely precise and temperature stabilized positioning system. We can prepare various simple (flat, spherical, cylindrical) as well as more complex freeform surfaces (including aspherical ones). The objective is to prepare high-quality surfaces of the desired shape with subnanometer surface roughness and low sub-surface damage of the crystal lattice. The final surface roughness of a flat Ge surface below 0.4 nm (RMS) was achieved for a very slow regime of the processing using feed rates ≤ 0.25 mm/min. At such a slow feed rate, a parasitic surface grating formed due to rastering the diamond tool along the surface was minimized. Surface roughness Ra was reached well below the level of 3 nm stated by the machining device manufacturer in specifications, which is a very good result. The sub-surface damage varied periodically and followed the surface morphology. Raman peak is shifting to higher phonon frequencies in commercially polished sample as in our sample produced using nano-machining which indicates lower compressive local stresses using our technology. The TEM analysis showed an amorphous layer with thickness of ≈30 nm which origin is the subject of our further research. We would like to emphasize that we do not observe any dislocations in the crystalline phase of germanium (110) laying under amorphous layer. We can conclude from our pilot experiments that the diamond tool nano-machining is a promising technology for high-quality surface treatment to replace less homogeneous chemical methods used in production of X-ray channel-cut crystal optics.

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Application of precision diamond machining to the manufacture of microphotonics components

Cited by 89 publications

References 15 publications

3D printed optics with nanometer scale surface roughness

3D printed optics with nanometer scale surface roughness

Development and speed control of water driven stage

Nano-machining for advanced X-ray crystal optics

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