Application of the differential Fabry–Perot interferometer in angle metrology

Çelik, Mehmet; Şahin, Ersoy; Yandayan, Tanfer; Hamid, Ramiz; Akgoz, A; Ozgur, Bulent; Cetintas, Mustafa; Demir, A.

doi:10.1088/0957-0233/27/3/035201

Cited by 13 publications

(6 citation statements)

References 28 publications

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“…The developed displacement system and proposed method will be used for calibration and comparison with highresolution displacement sensors which are used in dimensional metrology. The method will find direct application in longrange angle measurements with nanoradian uncertainties [18] as well as nanometre and sub-nanometre position control in semiconductor manufacturing processes [1,2].…”

Section: Discussionmentioning

confidence: 99%

Long-range displacement measurements using sideband modulation method

Cetintas¹,

Çelik²

2017

Meas. Sci. Technol.

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In this work, the concept for a long-range displacement measurement with a possibility of up to 100 µm with sub-nanometre uncertainty is introduced. In the proposed method, the displacements are calculated by use of frequency change measurements of the stabilized laser using a differential Fabry–Pérot interferometer (FPI) and a sideband modulation technique. In the work, an overall displacement measurement of up to 4 µm was performed with a combined uncertainty of 0.3 nm, in which the fractional part of the displacement was obtained by use of the sideband frequency technique, whereas the integer part of the displacement was calculated by the fringe counting of the FPI resonances. The suitability of the proposed method for long-range measurements up to 100 µm with sub-nanometre (0.6 nm) combined uncertainties is discussed.

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Section: Discussionmentioning

confidence: 99%

Long-range displacement measurements using sideband modulation method

Cetintas¹,

Çelik²

2017

Meas. Sci. Technol.

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“…Many methods exist for measuring angles using interferometry (for some examples see [8][9][10][11]). The angle interferometer we have built is a standard Twyman-Green interferometer (figure 1) that uses phase-stepping interferometry to create phase maps of the surface under test.…”

Section: Angle Interferometermentioning

confidence: 99%

Phase shifting angle interferometer

Eves,

Leroux,

Cen

2023

Metrologia

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A phase shifting Twymann-Green interferometer for the measurement of plane angle has been developed and characterized using a small-angle generator directly traceable to the definition of the radian. The impact of surface form on the measured angle was explored using a simple deformable mirror. The angle sensitivity of the interferometer did not depend upon the surface form. Comparison of the calibrations of two polygons and two angle gauge blocks by both the angle interferometer and a commercial autocollimator showed excellent agreement with all results having normalized errors less than 0.4. The standard uncertainty for the angle interferometer when measuring the polygons was less than 0.02".

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“…Recently, there has been a push to provide NMI traceability for measurement of small angles [14], partly driven by the extreme, small angle measurement requirements for x-ray mirrors deployed at synchrotron light and free electron laser (XFEL) sources [15,16]. The European Metrology Research Programme project 'SIB58 Angles' [17] made progress in addressing these requirements: for example, Celik et al [18] demonstrated the measurement of nanoradian (nrad) steps using a differential Fabry Perot interferometer, based on a linear interferometer [19].…”

Section: Small-angle Generatorsmentioning

confidence: 99%

Generating and measuring pico-radian angles

et al. 2022

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The angular performance of a nano-angle generator (NANGO) developed at Diamond Light Source has been characterised using a dual-beam laser interferometer designed and built at the National Physical Laboratory (NPL). NANGO is a flexure-based, piezo actuated device which generates milli- to sub-nano-radian angles for the calibration of metrology instruments used to test the quality of synchrotron X-ray mirrors and angular nano-positioning stages at Diamond. The NPL interferometer provides traceability for small angle measurements made by NANGO. An uncertainty budget has been developed for measurements over a 50 nanoradian range. In closed-loop, using feedback from the NANGO’s angle encoder, for the first time we show that 1 nanoradian steps made by NANGO are measurable by an external metrology device. The 200 kHz acquisition rate of the NPL angle interferometer also reveals new dynamic information about NANGO’s angular motion. The NPL interferometer demonstrates that NANGO in open-loop can make: distinct steps of 500 picoradians; sinusoidal oscillations at 0.4 Hz with an amplitude of 125 picoradians; or 1 nanoradian oscillations at 40 Hz. Traceability to the SI though National Metrology Institute instrumentation for NANGO will provide enhanced accuracy for a wide range of angle metrology applications at Diamond, including inputs to deterministic polishing techniques for the creation of next-generation X-ray mirrors and dynamic characterisation of nano-positioning stages.

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Application of the differential Fabry–Perot interferometer in angle metrology

Cited by 13 publications

References 28 publications

Long-range displacement measurements using sideband modulation method

Long-range displacement measurements using sideband modulation method

Phase shifting angle interferometer

Generating and measuring pico-radian angles

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