Microelectronic Engineering
 2010
DOI: 10.1016/j.mee.2009.11.120
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Application of VUV irradiation to promote the wet etch resistance of PSZ-SOG film inside the gap

Chia-Ming Chen1,
Ming–Kung Yeh2,
Hung-Ju Chien3
et al.
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Hydridosilazanes hydrolysis-condensation reactions studied by 1H and 29Si liquid NMR spectroscopy

Dargère
1
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Bounor‐Legaré
2
,
Boisson
3
et al. 2012
J Sol-Gel Sci Technol
17
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Hydridosilazanes hydrolysis-condensation reactions studied by 1H and 29Si liquid NMR spectroscopy

Dargère
1
,
Bounor‐Legaré
2
,
Boisson
3
et al. 2012
J Sol-Gel Sci Technol
17
0
15
0
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Low-temperature synthesis of silica coating on a poly(ethylene terephthalate) film from perhydropolysilazane using vacuum ultraviolet light irradiation

Naganuma
1
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Horiuchi
2
,
Kato
3
et al. 2013
Surface and Coatings Technology
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Physicochemical and structural properties of silica films prepared from perhydropolysilazane using vacuum ultraviolet irradiation

Naganuma,
Kato,
Watanabe
et al. 2024
Thin Solid Films
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