1994
DOI: 10.1063/1.870677
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Applications of intense pulsed ion beam to materials science*

Abstract: In addition to being initially developed as an energy driver for an inertial confinement fusion, an intense, pulsed, light-ion beam (LIB) has been found to be applied to materials science. If a LIB is used to irradiate targets, a high-density ‘‘ablation’’ plasma is produced near the surface since the range of the LIB in materials is very short. Since the first demonstration of quick preparation of thin films of ZnS by an intense, pulsed, ion-beam evaporation (IBE) using the LIB-produced ablation plasma, variou… Show more

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Cited by 96 publications
(26 citation statements)
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“…In this case, the table shown in the figure is replaced by an ablation target. Such thin-film experiments have also been described elswhere [3]. We report here on the analysis of new and novel microstructures formed in such layers.…”
Section: Introductionmentioning
confidence: 92%
“…In this case, the table shown in the figure is replaced by an ablation target. Such thin-film experiments have also been described elswhere [3]. We report here on the analysis of new and novel microstructures formed in such layers.…”
Section: Introductionmentioning
confidence: 92%
“…* Hence PHIBs are expected to be applied to surface treatment [1,2], thin-film deposition [3] or implantation processes. In particular, for implantation processes, PHIBs are expected to be used as a new type of technology since ion implantation and surface heat treatment or surface annealing are completed at one and the same time [4,5].…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] The development of the HIPIB apparatus has emerged as one of the most crucial issues for practical applications in surface engineering by HIPIB. 4 The HIPIB is usually created in conventional magnetically insulated ion diodes ͑MIDs͒ with transverse magnetic field in the acceleration gap to suppress electron flow and enhance the ion flow.…”
Section: Introductionmentioning
confidence: 99%