Applications of nonlinear laser nano/microlithography: fabrication from nanophotonic to biomedical components

Malinauskas, Mangirdas; Danilevičius, Paulius; Balčiūnas, Evaldas; Rekštytė, Sima; Stankevičius, Evaldas; Baltriukienė, Daiva; Bukelskienė, Virginija; Račiukaitis, Gediminas; Gadonas, R.

doi:10.1117/12.898982

Cited by 10 publications

(4 citation statements)

References 27 publications

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“…Depending on laser wavelength, exposure can be achieved via linear [5] or nonlinear absorption [6]. HL allows fabricating periodic structures over a large area relatively fast and that makes this technique attractive and promising for mass-fabrication of functional devices such as photonic crystals [7][8][9][10] or scaffolds [11,12]. HL has certain advantages over the direct laser writing (DLW) technique [13] due to the rapid fabrication of periodic structures.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of periodic micro-structures by holographic lithography

Stankevičius¹,

Gedvilas²,

Voisiat³

et al. 2013

Lith. J. Phys.

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The principles of the holographic lithography technique are reviewed, and the ability in the formation of structures with different periods by the holographic lithography technique in SZ2080 is demonstrated. The influence of laser exposure, phase shift between interfering laser beams, and the used laser wavelength on the structures fabricated by the four-beam interference technique has been studied. It is shown that by using the interfering beams with a different phase is it possible to reduce the period of the structure √ − 2 times compared to the four interfering beams of the same phase. Fabrication of micro-structures by the holographic lithography technique can be realized via multi-photon and single-photon polymerization processes. The structures created by these two techniques are compared. Finally, in the experiments with the five-beam interference, the doubleperiod effect was observed by adding the zero-order beam with a low intensity. The fabricated periodic microstructures have the potential to be used as a scaffold for cell growth and micro-optics.

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Section: Introductionmentioning

confidence: 99%

Fabrication of periodic micro-structures by holographic lithography

Stankevičius¹,

Gedvilas²,

Voisiat³

et al. 2013

Lith. J. Phys.

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show abstract

“…As dimensions (height and inner radius) of micro-tubes fabricated by different methods are not comparable, they were normalized by dimensions of a micro-tube fabricated by the OV method (60 μm height and 3 μm inner radius) in order to analyze fabrication time of micro-tubes by all three methods. The fabrication time of the normalized micro-tube by the DLW method was estimated in such a way: the fabrication time of the fabricated micro-tube by DLW in figure 3(a) (20 s) was multiplied by 1.5 as the time required for the micro-tube fabrication by the DLW method depends on the dimensions of the micro-tube [33] and the dimensions of the normalized micro-tube (60 μm height and 3 μm inner radius) are 1.5 times larger than the dimensions of the micro-tube fabricated by the DLW method (40 μm height and 3 μm inner radius).…”

Section: Resultsmentioning

confidence: 99%

Fabrication of micro-tube arrays in photopolymer SZ2080 by using three different methods of a direct laser polymerization technique

Stankevičius

Gertus

Rutkauskas

et al. 2012

J. Micromech. Microeng.

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In this paper we demonstrate femtosecond laser fabrication of micro-tubes with a height of several tens of micrometers in the photopolymer SZ2080 by three different methods: direct laser writing, using the optical vortex beam and holographic lithography. The flexibility of direct laser writing and dramatic increase of production efficiency by applying the vortex-shaped beam and four-beam interference approaches are presented. Sample arrays of micro-tubes were successfully manufactured applying all three methods and the fabrication quality as well as efficiency of the methods is compared. The processing time of a single micro-tube with 60 μm height and 3 μm inner radius is reduced 400 times for the holographic lithography technique and 500 times for the optical vortex method compared with the direct laser writing technique. The processing time of a micro-tube array containing 400 micro-tubes is the shortest for the holographic lithography method but not for the optical vortex method as in the case of a single micro-tube, because the holographic lithography method does not require time for sample translation. Additionally, the holographic lithography enables manufacturing of the whole micro-tube array by a single exposure. Although point-by-point photo-structuring ensures unmatched complexity of manufactured microstructures, employing nowadays high repetition rate amplified femtosecond lasers combined with beam shaping or several beam interference can envisage industrial applications for practical demands.

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“…Ultrafast lasers have been wildly applied in high-throughput microfabrication and patterning of metals , semiconductors 6,7 , and insulators [8][9][10][11] in science [12][13][14][15][16][17][18] , technology [19][20][21][22][23][24][25][26][27] , and medicine 28,29 . However, their industrial applications are restricted by the low laser machining rates and the high price of ultrashort laser irradiation sources.…”

Section: Introductionmentioning

confidence: 99%

Functional surface formation by efficient laser ablation using single-pulse and burst-modes

Žemaitis

Gaidys

Mikšys

et al. 2021

Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI

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Surfaces inspired by nature and their replication find great interest in science, technology, and medicine due to their unique functional properties. This research aimed to develop an efficient laser milling technology using single-pulse-and burst-modes of irradiation to replicate bio-inspired structures over large areas at high speed. The ability to form the trapezoidal-riblets inspired by shark skin at high production speeds while maintaining the lowest possible surface roughness was demonstrated.

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Applications of nonlinear laser nano/microlithography: fabrication from nanophotonic to biomedical components

Cited by 10 publications

References 27 publications

Fabrication of periodic micro-structures by holographic lithography

Fabrication of periodic micro-structures by holographic lithography

Fabrication of micro-tube arrays in photopolymer SZ2080 by using three different methods of a direct laser polymerization technique

Functional surface formation by efficient laser ablation using single-pulse and burst-modes

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