Applications of projection fringes and structured light surface metrology for semiconductor packaging and their challenges

Abstract

In our paper, we discuss applications of projection fringes and structured light surface metrology for measurements of the topography of specular and diffuse surfaces in semiconductor manufacturing. We report recent progress in the projection fringes metrology applied to the packaging of crystalline solar cells, and heat sinks for power devices. In addition, we also discuss the progress of metrology of highly reflective surfaces encountered in thin film solar cell manufacturing and cell phone production. We discuss factors limiting the accuracy and speed of these methods.