Applications of simultaneous ion backscattering and ion-induced X-ray emission

Musket, R. G.

doi:10.1016/0167-5087(83)91015-3

Cited by 16 publications

(1 citation statement)

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“…We have Investigated the application of simultaneous Rutherford backscattering (RBS) and particle induced x-ray emission (PIXE) measurements [1] for the analysis of oxygen on and in beryllium. The measurement goals were to determine surface oxygen with a detection limit of a few times 14 2 10 oxygen atoms/cm and bulk oxygen with a sensitivity approaching ten appm in a volume large enough to be representative of the bulk.…”

Section: Introductionmentioning

confidence: 99%

Analysis of oxygen on and in beryllium using 2 MeV helium ions

Musket¹

1987

Nuclear Instruments and Methods in Physics Research Section B:

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Analysis of oxygen on beryllium can be routinely performed using heliumion backscattering (RBS). However, determination of the bulk oxygen concen tration by this technique is limited to about 350 atomic parts per million (appm). We have performed simultaneous RBS and particle-induced X-ray emission (PIXE) measurements to improve the detection limit for bulk oxygen.The RBS measurements allowed determination of the surface oxygen before and after in situ sputter cleaning by argon ions in an ultra-high-vacuum system. PIXE measurements of specimens with surfaces maintained clean by sputtering permitted assessment of the concentration of oxygen in the bulk.For our geometry and detector sensitivities, 90 percent of the oxygen X-ray signal originated in the first 2.1 vm of the beryllium and a detection limit of 10 appm was found.

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Section: Introductionmentioning

confidence: 99%