Applications of the Photodissolution Effect in Chalcogenide Glasses

Inorganic chalcogenide photoresists are widely used in microelectronics and optoelectronics. Here, we describe strongly nonlinear chalcogenide photoresists fabricated on the basis of Ag-doped As2S3 glassy films. Photoresists are prepared by vacuum coevaporation of As2S3 bulk glass and Ag. Superlinear dissolution characteristics of Ag-doped photoresists are explained in the framework of the so-called “percolation approach.” The advantages of superlinear photoresists for maskless photolithography are briefly discussed.

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Optical and Photoluminescence Properties of Erbium-Doped Chalcogenide Glasses (GeGaS:Er)

Kasap

Koughia

Soundararajan

et al. 2008

IEEE J. Select. Topics Quantum Electron.

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Applications of the Photodissolution Effect in Chalcogenide Glasses

Cited by 4 publications

References 44 publications

Optical properties change in laser-induced Te/As2Se3 chalcogenide thin films

Optical properties change in laser-induced Te/As2Se3 chalcogenide thin films

Nonlinear photoresists for maskless photolithography on the basis of Ag-doped As2S3 glassy films

Optical and Photoluminescence Properties of Erbium-Doped Chalcogenide Glasses (GeGaS:Er)

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