Approximately 30 nm Nanogroove Formation on Single Crystalline Silicon Surface under Pulsed Nanosecond Laser Irradiation

Zhao, Lin; Ji, Lingfei; Hong, Minghui

doi:10.1021/acs.nanolett.2c01794

Cited by 16 publications

(4 citation statements)

References 37 publications

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“…Nowadays, although using a processing setup of orthogonally polarized double fs or ns laser beams, grooves of ∼ 10 nm [33] or cracks of ∼ 30 nm [34] can be formed directly on silicon (Si), single nano-grooves fabricated by single fs laser beam direct writing on Si is still a challenging research topic that requires further experimental exploration. In this paper, by using high-numerical-aperture (NA) objective lenses and precisely controlling the processing conditions of pulse energy and scanning speed, polarization-dependent single-groove structures with a linewidth of ∼ 180 nm can be stably prepared on Si by single fs laser beam direct writing.…”

Section: Introductionmentioning

confidence: 99%

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si

Ye 叶,

Huang 黄

2024

Chinese Phys. B

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It is well known that, femtosecond-laser pulses are easy to spontaneously induce deep-subwavelength periodic surface structures on transparent dielectrics, but not on non-transparent semiconductors. Nevertheless, in the study we demonstrate that by high-NA 800-nm femtosecond-laser direct writing with controlling the pulse energy and scanning speed in the near-damage-threshold regime, polarization-dependent deep-subwavelength single grooves with linewidths of ~180 nm can be controllably prepared on Si. Generally, the single-groove linewidth increases slightly with the increase of pulse energy and the decrease of scanning speed, whereas the single-groove depth significantly increases from ~300 to ~600 nm with the decrease of scanning speed, or even over 1 μm with the multi-processing, indicating the characteristics of transversal clamping and longitudinal growing of such deep-subwavelength single grooves. Then, EDS composition analysis of the near-groove region confirms that the single-groove formation tends to be an ultrafast, non-thermal ablation process, and the oxidized deposits nearby the grooves are easy to clean up. Furthermore, the results showing the strong dependence of groove orientation on laser polarization, and the occurrence of double-groove structures due to the interference of pre-formed orthogonal grooves, both indicate that the extraordinary field enhancement of strong polarization sensitiveness in the deep-subwavelength groove plays an important role for single-groove growth with high stability and collimation.

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Section: Introductionmentioning

confidence: 99%

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si

Ye 叶,

Huang 黄

2024

Chinese Phys. B

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“…Recently, some works have reported the fabrication of nanostructures at tens of nanometers by laser direct writing lithography 34 . Nanogrooves with a minimum feature size down to 30 nm can be formed directly on silicon surface with pulsed nanosecond laser irradiation 35 . Straight large-area nanoscale laser-induced periodic surface structures was fabricated with two femtosecond laser beams 36 .…”

Section: Introductionmentioning

confidence: 99%

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Yan

Jiang

et al. 2023

Light Sci Appl

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Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel multi beam lithography method to fabricate photonic crystal with nanoscale structure without cracking. Using multi-beam ultrafast laser processing and etching, parallel channels with subwavelength gap are obtained in yttrium aluminum garnet crystal. Combining optical simulation based on Debye diffraction, we experimentally show the gap width of parallel channels can be controlled at nanoscale by changing phase holograms. With the superimposed phase hologram designing, functional structures of complicated channel arrays distribution can be created in crystal. Optical gratings of different periods are fabricated, which can diffract incident light in particular ways. This approach can efficiently manufacture nanostructures with controllable gap, and offer an alternative to the fabrication of complex photonic crystal for integrated photonics applications.

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“…Superhydrophobic coating is also an efficient and convenient superhydrophobic surface solution with a consistent shelf life and adhesion strength . However, laser texturing has garnered increased attention because of its unique advantages of constructing any well-designed hybrid micro/nanostructure on various material surfaces in a single step. − In addition, the characteristics of extended service life, high efficiency, and cost-effectiveness make it a promising method for large-scale industrial application and promotion.…”

Section: Introductionmentioning

confidence: 99%

Multimodal Deep-Learning Framework for Accurate Prediction of Wettability Evolution of Laser-Textured Surfaces

Zhang

Yang

Zhao

et al. 2023

ACS Appl. Mater. Interfaces

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The lengthy process through which laser-textured surfaces transform from hydrophilic to hydrophobic severely restricts their practical applications. Accurately predicting the wettability evolution curve is crucial; however, developing a reliable prediction model remains challenging. Herein, a data-driven multimodal deep-learning framework was developed, in which multimodal data of micro/nanostructure morphology images, composition distribution images, and time information are effectively coupled and fed into a convolutional neural network (CNN). Rich data input and in-depth data mining make the framework more robust, achieving accurate prediction of the wettability evolution curves of various typical micro/nanostructures. Additionally, accurate prediction of input images with varying magnifications and untrained laser-textured surfaces demonstrates the generalizability of the multimodal CNN framework. The visualization results of the convolution layer confirmed the rationality of the information learned by the model. Additionally, the proposed multimodal CNN framework was successfully utilized to investigate the optimization process. Further, a laser-textured surface with a shorter evolution period and a larger final contact angle was realized. The proposed multimodal CNN framework offers an efficient and cost-effective method for predicting the wettability evolution curves and exploring the optimization processes, enhancing the application potential of laser micro/nanofabrication of superhydrophobic surfaces.

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Approximately 30 nm Nanogroove Formation on Single Crystalline Silicon Surface under Pulsed Nanosecond Laser Irradiation

Cited by 16 publications

References 37 publications

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si

Deep-subwavelength single grooves prepared by femtosecond laser direct writing on Si

Nanoscale multi-beam lithography of photonic crystals with ultrafast laser

Multimodal Deep-Learning Framework for Accurate Prediction of Wettability Evolution of Laser-Textured Surfaces

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