Aqueous Combustion Synthesis of Aluminum Oxide Thin Films and Application as Gate Dielectric in GZTO Solution-Based TFTs

Abstract

Solution processing has been recently considered as an option when trying to reduce the costs associated with deposition under vacuum. In this context, most of the research efforts have been centered in the development of the semiconductors processes nevertheless the development of the most suitable dielectrics for oxide based transistors is as relevant as the semiconductor layer itself. In this work we explore the solution combustion synthesis and report on a completely new and green route for the preparation of amorphous aluminum oxide thin films; introducing water as solvent. Optimized dielectric layers were obtained for a water based precursor solution with 0.1 M concentration and demonstrated high capacitance, 625 nF cm(-2) at 10 kHz, and a permittivity of 7.1. These thin films were successfully applied as gate dielectric in solution processed gallium-zinc-tin oxide (GZTO) thin film transistors (TFTs) yielding good electrical performance such as subthreshold slope of about 0.3 V dec(-1) and mobility above 1.3 cm2 V(-1) s(-1).

Field Effect Sensors for Nucleic Acid Detection: Recent Advances and Future Perspectives

“…These methods are perfectly suited for low temperature fabrication, including conventional printing methods allowing integration with cheap and flexible substrates. However, reproducibility and high quality films are still difficult to obtain [53,54,55,56,57]. Physical methods such as thermal evaporation and sputtering represent an alternative for the production of ISFET devices.…”

“…Such developments suggest the possibility of cheap production processes and material to further reduce the overall cost of molecular diagnostics. The use of low temperature fabrication processes will pave the way to produce FEDs on flexible low cost substrates, such as biodegradable polymers, which show excellent properties [56,64,95,96,97]. The remarkable development of organic and oxide semiconductors based devices and their application in biosensing may established these as a new generation of electronic devices, providing an attractive alternative for DNA based biosensors [95,96,97].…”

Low-temperature solution-processed alumina dielectric films for low-voltage organic thin film transistors

“…Moreover, Al 2 O 3 based dielectrics, such as sodium beta-alumina [20], Al 2 O 3 /polymer nanocomposite [21], aluminum titanate [22] have also widely employed for TFTs. Recently, Al 2 O 3 have also been employed as high-performance dielectrics for transparent oxide TFTs, indicating the universal functionality [23][24][25].…”

Low-Impurity High-Performance Solution-Processed Metal Oxide Semiconductors via a Facile Redox Reaction

“…Low thermal budget processes provide external energy such as ultraviolet irradiation, [8][9] microwave annealing, 10 infrared exposure, 11 and high-pressure annealing to reduce the thermal budget. [12][13][14] In the new chemical approaches, ligands and counter ions are carefully designed to reduce the activation energy and lower the thermal budget, as in alkoxide systems, 15 combustible processes, 8,[16][17] and aqueous routes [18][19][20][21] . Among these methods, the carbon-free aqueous route can form high-quality films at low temperatures with minimal environmental impact.…”