Area-selective Cu Film Growth on TiN and SiO&lt;sub&gt;2&lt;/sub&gt; by Supercritical Fluid Deposition

Usami, Naoto; Ota, Etsuko; Higo, Akio; Momose, Takeshi; Mita, Yoshio

doi:10.1541/ieejsmas.140.31

Search citation statements

Order By: Relevance

Paper Sections

Select...

Experimental Design and Fabrication1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2020

2021

Publication Types

Select...

Article1

Other1

Relationship

Self Cite1

Independent1

Authors

Journals

Cited by 2 publications

(1 citation statement)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To demonstrate our proposed method, we utilized the SCFD experimental systems in Ref. [26]. SCFD is a promising technology for realizing metallic microstructures [27][28].…”

Section: Experimental Design and Fabricationmentioning

confidence: 99%

Drop-In Test Structure to Evaluate Residual Stress in Conformally Grown Films

Usami

Ota

Higo

et al. 2021

IEEE Trans. Semicond. Manufact.

Self Cite

View full text Add to dashboard Cite

We propose and demonstrate a drop-in test structure to visualize and measure the residual stress in the conformally deposited film. For reliable device process of microsystems (such as 3-D MEMS), the residual stress must be controlled through quantitative evaluation at each deposition step. A small drop-in test structure placed near the main sample is suitable for monitoring film characteristics. We developed a free-standing rotating beam stress sensor as the drop-in test structure to visualize and measure the residual stress in conformally deposited films with no additional processes. The dimensions of the developed drop-in test structure chips were 5 mm × 10 mm. For a demonstration, Cu supercritical fluid deposition (SCFD) was performed over the test structure chips under a couple of conditions. The residual stresses in SCFD Cu films were successfully extracted by equation-based analysis.

show abstract

“…To demonstrate our proposed method, we utilized the SCFD experimental systems in Ref. [26]. SCFD is a promising technology for realizing metallic microstructures [27][28].…”

Section: Experimental Design and Fabricationmentioning

confidence: 99%