Argon–water DBD pretreatment and vapor‐phase silanization of silica: Comparison with wet‐chemical processes

Klages, Claus‐Peter; Raev, Vitaly; Murugan, Divagar; Sai, V. V. R.

doi:10.1002/ppap.201900265

Cited by 2 publications

(1 citation statement)

References 36 publications

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“…Simultaneously, the temperature of the chamber was raised to 80 °C. [ 13,23 ] Then after, the temperature was maintained at 80 °C during the whole silanization process. Then the silanized chips were utilized for the further process without any washing steps involved.…”

Section: Methodsmentioning

confidence: 99%

Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization

Murugan,

Tintelott,

Amiri

et al. 2023

Physica Status Solidi (a)

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Silanization is one of the widely explored surface modification strategies for bio‐functionalization of oxide interfaces. For biosensor applications, silanes with active terminal groups such as amine, thiol, carboxylic, and aldehyde groups are utilized in routine. In near‐field sensing schemes like biologically sensitive field‐effect transistors (BioFETs), it is crucial to generate a homogenous layer of silane to confine the bio‐interactions in close vicinity of the sensor interface. The homogeneity of such biofunctional layer is determined by the surface activation and silanization protocol being applied. Here, the impact of surface activation process and silanization on electrical characteristic of field‐effect devices was studied comprehensively using an electrolyte‐oxide‐semiconductor (EOS) capacitor with a high quality gate oxide. The thermally grown silicon oxide (SiO2) interface was activated using acidic mixtures and plasma treatment, while the subsequent silanization steps were investigated comparatively using two different silanes (3‐aminopropyl triethoxysilane (APTES) and 3‐glycidyloxypropyl trimethoxysilane (GPTMS) in wet‐chemical and vapour‐phase processes. Furthermore, the optimized silanization process was utilized to immobilize an oligo strand at the EOS capacitor surface, followed by the hybridization of complementary oligo strands. The optimized protocol holds potential for large‐scale production of functional oxide interfaces for various applications.This article is protected by copyright. All rights reserved.

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Section: Methodsmentioning

confidence: 99%

Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization

Murugan,

Tintelott,

Amiri

et al. 2023

Physica Status Solidi (a)

Self Cite

View full text Add to dashboard Cite

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Review: 3-Aminopropyltriethoxysilane (APTES) Deposition Methods on Oxide Surfaces in Solution and Vapor Phases for Biosensing Applications

et al. 2022

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Surface functionalization and bioreceptor immobilization are critical processes in developing a highly sensitive and selective biosensor. The silanization process with 3-aminopropyltriethoxysilane (APTES) on oxide surfaces is frequently used for surface functionalization because of beneficial characteristics such as its bifunctional nature and low cost. Optimizing the deposition process of the APTES layer to obtain a monolayer is crucial to having a stable surface and effectively immobilizing the bioreceptors, which leads to the improved repeatability and sensitivity of the biosensor. This review provides an overview of APTES deposition methods, categorized into the solution-phase and vapor-phase, and a comprehensive summary and guide for creating stable APTES monolayers on oxide surfaces for biosensing applications. A brief explanation of APTES is introduced, and the APTES deposition methods with their pre/post-treatments and characterization results are discussed. Lastly, APTES deposition methods on nanoparticles used for biosensors are briefly described.

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Argon–water DBD pretreatment and vapor‐phase silanization of silica: Comparison with wet‐chemical processes

Cited by 2 publications

References 36 publications

Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization

Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization

Review: 3-Aminopropyltriethoxysilane (APTES) Deposition Methods on Oxide Surfaces in Solution and Vapor Phases for Biosensing Applications

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