2004
DOI: 10.1007/s00339-004-2588-z
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Arrays of 3D micro-columns generated by laser ablation of Ta and steel: modelling of a black body emitter

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Cited by 17 publications
(8 citation statements)
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“…Microstructuring of the flat silicon (Si) substrate surfaces by ultrafast lasers [38,43] under reactive gas (SF 6 ) atmosphere was chosen as the method of surface micro-and nanostructuring because it produces surface morphologies exhibiting two length scales [43] through a simple one-step process, without the need of a clean room facility and high-vacuum equipment requirements, and it can be applied to a wide variety of materials [44][45][46]. Silicon substrates have been used in view of potential applications that can be readily compatible with the existing semiconductor technology.…”
Section: Methodsmentioning
confidence: 99%
“…Microstructuring of the flat silicon (Si) substrate surfaces by ultrafast lasers [38,43] under reactive gas (SF 6 ) atmosphere was chosen as the method of surface micro-and nanostructuring because it produces surface morphologies exhibiting two length scales [43] through a simple one-step process, without the need of a clean room facility and high-vacuum equipment requirements, and it can be applied to a wide variety of materials [44][45][46]. Silicon substrates have been used in view of potential applications that can be readily compatible with the existing semiconductor technology.…”
Section: Methodsmentioning
confidence: 99%
“…Visual examination, however, showed a dark-gray to black color. Apparently, the light falling on the roughened surface gets scattered and absorbed, resulting in the appearance of dark surfaces [16,17]. For this reason, optical microscopy of the surfaces was difficult.…”
Section: Characterization Of Mca-structured Surfacesmentioning
confidence: 99%
“…MCA is produced by laser ablation with an excimer laser having energy in the range of a few Joules, pulse duration of 0.002-1.5 ms, and wavelength in the range of 1.15-11.00 mm. Such adjustable characteristics of the laser allow variation of the material choice and MCA process parameters over a wide range [16,17]. An example of MCA formed on the surface of steel is shown in Fig.…”
Section: Introductionmentioning
confidence: 99%
“…Photolithographic strategies such as gray‐scale photolithography, multiphoton lithography, and interference lithography fabricate high resolution 3D structures, but generally require light‐activated materials and sophisticated infrastructure 7–9. Direct layer‐by‐layer placement or removal of materials, for example, stereolithography, 3D printing, and laser ablation, typically exhibit low feature resolution, low throughput, or require specialized and expensive instrumentation 10–12. Here we present a strategy termed liquid lithography which, using no pattern‐alignment steps or dedicated equipment, can nevertheless rapidly and efficiently construct intricate 3D assemblies.…”
mentioning
confidence: 99%