Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy

Xue, Gaopeng; Toda, Masaya; Li, Xinghui; Wang, Xiaohao; Ono, Takahito

doi:10.1109/jmems.2021.3123962

Cited by 6 publications

(5 citation statements)

References 31 publications

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“…Therefore, the impact of each bit on the final system displacement appears to add up along the chain of the connecting springs. The DAC resolution can be enlarged by adding more sliders, such that a combination of, e.g., four or five sliders would result in a resolution of 3 4 = 81 or 3 5 = 243, respectively. By adding more bits to the DAC, the overall DAC displacement x DAC increased, too.…”

Section: Digital-to-analog Converting Actuators (Dac)mentioning

confidence: 99%

“…Lateral stability also improved with the placement of symmetrical and tilted serpentine springs on both sides of the actuators [4]. The combination of multiple comb-drive actuators allowed not only bi-directional deflection, but also deflection in preferred (as well as orthogonal) directions [5]. Xue et al [5] built an XYZ microstage for 3D atomic force microscopy (AFM), wherein the comb-drive actuators were guided by folded flexure springs, achieving a maximum deflection of 50.5 µm at 80.9 V. A deflection of 245 µm at 120 V was achieved by Olfatnia et al [6] using a bending mechanism based on a clamped paired double parallelogram (C-DP-DP).…”

Section: Introductionmentioning

confidence: 99%

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Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

et al. 2023

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In this paper, we present different microelectromechanical systems based on electrostatic actuators, and demonstrate their capacity to achieve large and stepwise displacements using a cooperative function of the actuators themselves. To explore this, we introduced micro-stepper actuators to our experimental systems, both with and without a guiding spring mechanism; mechanisms with such guiding springs can be applied to comb-drive and parallel-plate actuators. Our focus was on comparing various guiding spring designs, so as to increase the actuator displacement. In addition, we present systems based on cascaded actuators; these are converted to micromechanical digital-to-analog converters (DAC). With DACs, the number of actuators (and thus the complexity of the digital control) are significantly reduced in comparison to analog stepper-actuators. We also discuss systems that can achieve even larger displacements by using droplet-based bearings placed on an array of aluminum electrodes, rather than guiding springs. By commutating the voltages within these electrode arrays, the droplets follow the activated electrodes, carrying platforms atop themselves as they do so. This process thus introduces new applications for springless large displacement stepper-actuators.

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Section: Digital-to-analog Converting Actuators (Dac)mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

et al. 2023

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“…3 In the field of bioengineering, microdriving stage with high resolution can perform fine manipulation of the internal structure of cells, achieving systematization of biological operations. 4,5 Therefore, the micro-/nano-level driving stage has Review of Scientific Instruments ARTICLE pubs.aip.org/aip/rsi gradually become one of the irreplaceable motion parts in many fields. Generally, a simple servo control system can be used to achieve microdriving at the micrometer level, but the combination of microdriving stage structure design and precision control system needs to be considered to meet the high-precision requirements for nano-/subnanometer feed.…”

Section: Introductionmentioning

confidence: 99%

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Zhang,

Huang,

Zhang

et al. 2024

Review of Scientific Instruments

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Multidimensional microdriving stage is one of the key components to realize precision driving and high-precision positioning. To meet nanometer displacement and positioning in the fields of micro-/nano-machining and precision testing, a new six-degree-of-freedom microdriving stage (6-DOF-MDS) of multilayer spatially distributed piezoelectric ceramic actuators (PZTs) is proposed and designed. The interior of the 6-DOF-MDS is a hollow design. The flexure hinge is used as the transmission mechanism, and the series–parallel hybrid driving of the corresponding PZTs achieves the microtranslation in the X, Y, and Z directions and the microrotation around the three axes of the microdriving stage, forming a microdisplacement mechanism with high rigidity and simple structure, which can realize the microfeed of 6-DOF. The force–displacement theory and lug boss structure optimization of the 6-DOF-MDS are analyzed, while the strength checking and natural frequency of the 6-DOF-MDS are also simulated by the finite element method. In addition, the real-time motion control system of the 6-DOF-MDS is designed based on Advanced RISC Machines. Through a series of verification experiments, the stroke and resolution results of the 6-DOF-MDS are obtained, where the displacements in the X, Y, and Z directions are 20.72, 20.02, and 37.60 μm, respectively. The resolution is better than 0.68 nm. The rotation angles around X, Y, and Z are 38.96″, 33.80″, and 27.87″, respectively, with an angular resolution of 0.063″. Relevant coupling experiments were also performed in this paper; in the full stroke linear running of X-axis, the maximum coupling displacements of the Y- and Z-axes are 1.04 and 0.17 μm, respectively, with the corresponding coupling rates of ∼5.0% and 0.8%. The maximum coupling angles for the X-, Y-, and Z-axes are 0.33″, 0.14″, and 2.30″, respectively. Considering the coupling of the 6-DOF-MDS, decoupling measures and specific mathematical models have also been proposed. The proposed multidimensional microdriving stage achieves subnanometer resolution and can be used for the precise positioning and attitude control of precision instruments at the nano-/subnanometer level.

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“…Micropositioning stages have been widely applied in various applications, such as optical fibers alignment [1], scanning force microscopy [2], cells manipulation [3], and precision manufacturing [4]. Such devices offer the ability to control the position of an object with a micrometer or sub-micrometer resolution.…”

Section: Introductionmentioning

confidence: 99%

Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages

Cheah

Alshebly

Ali

et al. 2022

J. Micromech. Microeng.

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This paper presents two novel large-stroke XY micropositioning stages that are fabricated completely using four-dimensional (4D) printed polylactic acid (PLA). The proposed designs do not require manual training to perform actuation. Instead, printing speed is used to achieve shape programming and manipulate the deformation and shrinking levels of the PLA microactuators that control the microstage. A relationship between the printing speed, number of layers, and deformation value is formulated to model the performance of the microactuators based on these variables. The same approach is then used to develop the two proposed designs in this work. Actuations in the x- and y-axes are achieved using PLA actuators that are printed at speeds in the range of 40 – 80 mm/s, while the rest of the structure (passive part) is printed at a speed of 10 mm/s to minimize unwanted deformations. The microactuators are activated by immersing the designs in hot water at 85 °C. The maximum values of the x- and y-actuations are achieved when using the highest printing speed for the microactuators. Design 1 offers actuation values of 1.99 and 1.40 mm along the x- and y-axes, respectively, while these values are 1.76 and 2.30 mm when using Design 2. The proposed designs offer a cost-effective batch fabrication solution for micropositioning applications, where the weight of the PLA required for Design 1 and Design 2 is 48.37 g and 12.61 g, respectively, which respectively costs $0.65 and $0.17. In addition, the designs offer a promising performance compared to the currently available large-stroke micropositioning stages in terms of the simplicity of the fabrication process and the area ratio.

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Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy

Cited by 6 publications

References 31 publications

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

Design and experiment of multidimensional and subnanometer stage driven by spatially distributed piezoelectric ceramics

Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages

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