Assessment of Design and Mechanical Characteristics of MEMS Probe Tip with Fine Pitch

하석재,; 김동우,; 신봉철,; 조명우,; 한청수,

doi:10.5762/kais.2010.11.4.1210

Cited by 5 publications

(4 citation statements)

References 5 publications

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“…Researchers have used finite element software to simulate and study the mechanical and structural properties of probes, such as needle stiffness and structural analysis [16][17][18], with the aim of obtaining the optimal geometric design [19,20]. The finite element analysis technique has also been verified experimentally to obtain a new probe with tiny contact loads [21].…”

Section: Introductionmentioning

confidence: 99%

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

Lin

Yao

et al. 2021

Int J Adv Manuf Technol

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A probe is an important part of high-precision thread-measuring machines. Probe design affects the ability of the machine to achieve precision. The development of three-dimensional (3D) thread-measuring machines has mandated strict requirements for matching measuring heads. A contact scanning probe offers the advantages of a relatively high measurement accuracy and stable performance. In this study, the structure of the scanning probe was designed. First, a micro-force probe model was established according to 3D thread characteristics. The "T"-shaped, ballpoint-pen-shaped needle was selected according to the characteristics of the detection hole and thread. Thereafter, the dimension parameters of the measuring ball, measuring bar, parallel spring plates, and other components were designed to enable the measuring head to meet the precision requirements. The flexural deformation of the measuring rod was analyzed to determine the appropriate length and diameter of the measuring rod. Finally, the effective static and dynamic characteristics of the head were demonstrated through finite element simulation and experimental measurements. In addition, the static characteristics of the probe were measured. The return error was 0.29 µm, and the repeatability error was 0.24 µm. The dynamic characteristics were tested using the percussion method, and the natural frequency was 180 Hz. These results help ensure the precision of the probe and improve the measuring precision of the machine. KeywordsContact scanning probe • Micro-force probe model • Structural optimization • Static and dynamic characteristics * Jing Yu

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Section: Introductionmentioning

confidence: 99%

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

Lin

Yao

et al. 2021

Int J Adv Manuf Technol

View full text Add to dashboard Cite

show abstract

“…Researchers have used finite element software to simulate and study the mechanical and structural properties of probes, such as needle stiffness and structural analysis [14][15][16], with the aim of obtaining the optimal geometric design [17,18]. The finite element analysis technique has also been verified experimentally to obtain a new probe with tiny contact loads [19].…”

Section: Introductionmentioning

confidence: 99%

Design And Characteristic Research of Contact Probe For High-Precision 3D Thread-Measuring Machine

Yu¹,

Lin²,

Yao³

et al. 2021

Preprint

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A probe is an important part of high-precision thread-measuring machines. Probe design affects the ability of the machine to achieve precision. The development of three-dimensional (3D) thread-measuring machines has mandated strict requirements for matching measuring heads. A contact scanning probe offers the advantages of a relatively high measurement accuracy and stable performance. In this study, the structure of the scanning probe was designed. First, a micro-force probe model was established according to 3D thread characteristics. The “T”-shaped, ballpoint-pen shaped needle was selected according to the characteristics of the detection hole and thread. Thereafter, the dimension parameters of the measuring ball, measuring bar, parallel spring plates, and other components were designed to enable the measuring head to meet the precision requirements. The flexural deformation of the measuring rod was analyzed to determine the appropriate length and diameter of the measuring rod. Finally, the effective static and dynamic characteristics of the head were demonstrated through finite element simulation and experimental measurements. In addition, the static characteristics of the probe were measured. The return error was 0.29 µm, and the repeatability error was 0.24 µm. The dynamic characteristics were tested using the percussion method, and the natural frequency was 180 Hz. These results help ensure the precision of the probe and improve the measuring precision of the machine.

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“…Recently, semiconductor technology develops to highly integrate and compact. So testing process for semiconductor is also developed [1]. Probe station is test equipment for chips on wafer, using probe tip involved in probe card for testing [2].…”

Section: Introductionmentioning

confidence: 99%

A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip

Kim¹,

Lee²,

Ha³

et al. 2015

JAMP

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In semiconductor manufacturing process, probe station that is testing equipment is important. Inspection step is for detecting defects on semiconductor before the packaging. Probe card is a part of probe station and contains probe tip that contacts to semiconductor. Through probe tip, it can inspect defects of semiconductor. In this paper, optimization method is used with response surface analysis to design MEMS type probe tip. And fabricating probe tip uses maskless lithography, electro-plating and lapping process.

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Assessment of Design and Mechanical Characteristics of MEMS Probe Tip with Fine Pitch

Cited by 5 publications

References 5 publications

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

Design And Characteristic Research of Contact Probe For High-Precision 3D Thread-Measuring Machine

A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip

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Assessment of Design and Mechanical Characteristics of MEMS Probe Tip with Fine Pitch

Cited by 5 publications

References 5 publications

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

Design and characteristic research of contact probe for high-precision 3D thread-measuring machine

­­Design And Characteristic Research of Contact Probe For High-Precision 3D Thread-Measuring Machine

A Study of Design Optimization Using Response Surface Analysis and Fabricaiton MEMS Probe Tip

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Product

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Design And Characteristic Research of Contact Probe For High-Precision 3D Thread-Measuring Machine