2008
DOI: 10.1364/ao.47.006778
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Asymmetrical optical lenslet array realized by spatial light modulator for measuring toroidal surfaces

Abstract: The Shack-Hartmann wavefront sensor (SHWS) recently has been extensively researched for optical surface metrology due to its extendable dynamic range compared with interferometry technique. In this paper, we proposed to use a digital SHWS to measure toroidal surfaces, which are widely used in many optical systems due to their different symmetries and curvatures in the X and Y directions. For what is believed to be the first time, an asymmetrical optical lenslet array implemented by a spatial light modulator wa… Show more

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Cited by 4 publications
(5 citation statements)
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“…1. Also, in the digital SHWS system, using a spatial light modulator (SLM) as a flexible lenslet array to better focus a wavefront with varying curvatures [15] increases the noise due to the zero and high-order diffraction.…”
Section: A Noisementioning
confidence: 99%
See 1 more Smart Citation
“…1. Also, in the digital SHWS system, using a spatial light modulator (SLM) as a flexible lenslet array to better focus a wavefront with varying curvatures [15] increases the noise due to the zero and high-order diffraction.…”
Section: A Noisementioning
confidence: 99%
“…6) are toroidal surfaces with different radii in two directions, and are manufactured from programmable diamond turning. These aspheric surfaces have wide applications in the optics and manufacturing industries [15]. Table 1 shows the detailed specifications of the two samples.…”
Section: B Samplesmentioning
confidence: 99%
“…Normally, a freeform surface is measured in a digital wavefront sensing system 5 . The use of the spatial light modulator (SLM) as a flexible lenslet array to better focus a wavefront with varying curvatures increases the noise due to the zero and high order diffraction, as shown in Fig.…”
Section: Dynamic Focal Spots Registration Algorithm 21 Challengesmentioning
confidence: 99%
“…From the working principle of the SHWS, the lenslet array samples the incoming wavefront reflected back from the sample surface, and forms individual focal spots on the detector plane. However, due to the different curvatures in two perpendicular dimensions of a toroidal surface, it is impossible to sample the wavefront in two directions simultaneously with the normal lenslet array 5 .…”
Section: Challenges In Using Shws For Toroidal Surface Measurementsmentioning
confidence: 99%
“…With the great flexibility provided by the SLM, various parameters of the designed lenslet array can be easily adjusted. Elliptical lenslets provide different optical powers in two directions 5 . When the parameters are designed properly, this kind of digital SHWS can sample the wavefront of a toroidal surface properly.…”
Section: Elliptical Lenslet Array Designmentioning
confidence: 99%