Athermal and widely tunable VCSEL with bimorph micromachined mirror

Nakahama, Masanori; Sakaguchi, Takahiro; Matustani, Akihiro; Koyama, Fumio

doi:10.1364/oe.22.021471

Cited by 11 publications

(10 citation statements)

References 25 publications

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“…7(a). 58) The wavelength was almost fixed even under different temperatures, clearly showing the continuous wavelength tuning with athermal operation. Figure 7(b) shows the temperature coefficient as a function of wavelength.…”

Section: Wavelength Engineeringmentioning

confidence: 88%

“…58) The schematic structure and scanning electron microscope image of the fabricated MEMS VCSEL are shown in Figs. 5(a) and 5(b), respectively.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

“…5(a) and 5(b), respectively. 58) The top mirror of the VCSEL is supported by a micromachined cantilever which is composed of an 18.5 pairs top Al 0:2 Ga 0:8 As/ Al 0:85 Ga 0:15 As distributed Bragg reflector (DBR) and a one -thick Al 0:85 Ga 0:15 As ''strain control layer (SCL)''. Since the thermal expansion coefficient of the SCL is smaller than the average expansion coefficient of the AlGaAs DBR, the cantilever deflects downward as its temperature is increased, resulting in a blue-shift of the resonant wavelength.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

“…6(a). 58) Different voltages were applied between the tuning contact and the top n-electrode of the VCSEL. The wavelength was blue-shifted as increasing the applied voltage and a continuous wavelength tuning range of over 30 nm was obtained with less than 15 V. Sidemode suppression ratio (SMSR) was greater than 30 dB from 830 to 841 nm.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

“…Figure 6(b) shows the wavelength of a fundamental transverse mode. 58) The calculated tuning characteristic is also given by using a 1D cantilever model with electro-static actuation.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

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Advances and new functions of VCSEL photonics

Koyama

2014

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A vertical cavity surface emitting laser (VCSEL) was born in Japan. The 37 years' research and developments opened up various applications including datacom, sensors, optical interconnects, spectroscopy, optical storages, printers, laser displays, laser radar, atomic clock and high power sources. A lot of unique features have been already proven, such as low power consumption, a wafer level testing and so on. The market of VCSELs has been growing up rapidly and they are now key devices in local area networks based on multi-mode optical fibers. Optical interconnections in data centers and supercomputers are attracting much interest. In this paper, the advances on VCSEL photonics will be reviewed. We present the high-speed modulation of VCSELs based on a coupled cavity structure. For further increase in transmission capacity per fiber, the wavelength engineering of VCSEL arrays is discussed, which includes the wavelength stabilization and wavelength tuning based on a micro-machined cantilever structure. We also address a lateral integration platform and new functions, including high-resolution beam scanner, vortex beam creation and large-port free space wavelength selective switch with a Bragg reflector waveguide.

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Section: Wavelength Engineeringmentioning

confidence: 88%

“…58) The schematic structure and scanning electron microscope image of the fabricated MEMS VCSEL are shown in Figs. 5(a) and 5(b), respectively.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

Section: Wavelength Engineeringmentioning

confidence: 99%

Section: Wavelength Engineeringmentioning

confidence: 99%

“…Figure 6(b) shows the wavelength of a fundamental transverse mode. 58) The calculated tuning characteristic is also given by using a 1D cantilever model with electro-static actuation.…”

Section: Wavelength Engineeringmentioning

confidence: 99%

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Advances and new functions of VCSEL photonics

Koyama

2014

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Removing Thermal Gain–Cavity Detuning Effect Based on Supergain Quantum Well–Wire Hybrid Nanostructures for Single-Frequency Laser Diodes

Tai,

Wang,

Duan

et al. 2024

ACS Appl. Nano Mater.

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It is well-known that thermal detuning between the gain peak and the cavity mode always occurs and leads to considerable gain loss in single-frequency laser diodes. For this issue, scientists have not found an effective solution so far. In this article, we propose an approach to addressing this problem effectively. It is associated with a fundamental change of the quantum structure to acquire a supergain spectrum (i.e., both wide and uniform gain distribution) by means of the self-assembled quantum well−wire hybrid nanostructure. With the supergain spectrum, the cavity mode can constantly obtain the max gain over a wide temperature range with a very small gain fluctuation of <4 cm −1 . The simulation of an InGaAs vertical-cavity surface-emitting laser (VCSEL) model shows that the effective gain that the cavity mode can obtain is increased by >202% and the threshold pump power is reduced by >38.9% accordingly when the device temperature is higher than 360 K, in comparison to the performance of a pure quantum well. Therefore, this demonstrates great superiority for removing the gain−cavity detuning effect and improving the high-temperature performance of single-frequency laser diodes.

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