2021
DOI: 10.1016/j.optlastec.2021.106925
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Athermal high-Q tantalum-pentoxide-based microresonators on silicon substrates

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Cited by 5 publications
(2 citation statements)
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“…The factor of the TiO -cladded LiNbO microresonator is reduced by 11% as compared with the uncladded one. Other material combinations like GeSbSe and Ta O were tested [136,137], showing low , but significant losses (…”
Section: Additional Thermal Stabilizationmentioning
confidence: 99%
“…The factor of the TiO -cladded LiNbO microresonator is reduced by 11% as compared with the uncladded one. Other material combinations like GeSbSe and Ta O were tested [136,137], showing low , but significant losses (…”
Section: Additional Thermal Stabilizationmentioning
confidence: 99%
“…To mitigate undesired thermal effect, researchers often explore a combination of different materials with opposite temperature coefficients (TOC), a configuration commonly referred to as an athermal hybrid microresonator [30]- [36]. Nevertheless, achieving the athermal effect often comes at the cost of compromising the Q factor, which drops below 10 6 due to either material absorption or the immaturity of fabrication techniques for diverse materials, such as the TiO 2 [37], Ta 2 O 5 [35] and organic materials (PDMS [21] or PMMA [23]). Additionally, the interplay of opposing thermooptic effects can result in thermal oscillations within the hybrid microresonator.…”
Section: Introductionmentioning
confidence: 99%