Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

Liu, Yaoge; Elam, Fiona M.; Zoethout, E.; Starostin, Sergey A.; Sanden, M.C.M. van de; Vries, H.W. de

doi:10.1088/1361-6463/ab269b

Cited by 7 publications

(5 citation statements)

References 66 publications

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“…The polymer surface can be modified uniformly and continuously in the plasma zone through which the film passes at a speed of 10 m min −1 . To achieve large-scale treatment with good uniformity on an industrial scale, Liu et al investigated an APP dual-frequency DBD [138]. Figure 17 presents a schematic of the roll-to-roll dual-frequency plasma reactor.…”

Section: Industrial-scale Atmospheric Pressure Reactorsmentioning

confidence: 99%

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Booth

Vesel

Nikiforov

et al. 2022

Plasma Sources Sci. Technol.

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Polymer materials are widely employed in many fields due to the ease with which they can be formed into complex shapes, their versatile mechanical properties, light weight, and low cost. However, many applications can be hindered by the chemical compatibility of the polymer surface, which is generally hydrophobic and bonds poorly to other media such as paints, glues, metals and biological samples. While polymer surfaces can be treated by wet chemical processes, the aggressive reagents employed are detrimental to the environment, limiting the range of modifications that can be achieved in an industrial context . Plasma functionalisation is an attractive alternative, offering great versatility in the processed surface characteristics, and often using only environmentally benign rare gases, oxygen and nitrogen, as well as organic precursors. Since the modified surface is only a few monolayers thick, the processes are extremely rapid and low in cost. The first industrial process to be developed was plasma oxidation, increasing the surface energy of the polymer to allow adhesion of paint, glue and metal to the component. This polymer surface functionalisation can be achieved with both low-pressure plasmas and with atmospheric pressure discharges. Subsequently many other processes have emerged, allowing other functional groups to be grafted, including amines, hydroxyl and carboxylic acid groups. Plasma polymerisation, starting from gaseous monomers, allows a whole new family of surface chemistries to be created. These processes have many exciting applications in the biomedical field due to the control they give on biocompatibility and selective interaction with living cells. This article will present the fundamentals of plasma interactions with polymers, the plasma devices employed (both at low-pressure and at atmospheric pressure), their advantages and drawbacks, and a range of current and future applications.

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Section: Industrial-scale Atmospheric Pressure Reactorsmentioning

confidence: 99%

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Booth

Vesel

Nikiforov

et al. 2022

Plasma Sources Sci. Technol.

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“…Also, it can be assigned to Si-O-C asymmetric stretching. Furthermore, the Si-CH2-Si absorption band is usually observed at 1080 cm -1 -1040 cm -1 , but for oxygen containing coatings this peak is masked by the Si-O-Si band [43] , [44]. The absorption band at 840 cm -1 can be attributed to CH3 rocking vibrations in SiMe3, while the peak at 795 cm -1 is referred to CH3 rocking vibrations in SiMe2.…”

Section: Hmdso Polymerized Ftir Spectramentioning

confidence: 99%

Comparative study of bulk and surface compositions of plasma polymerized organosilicon thin films

Dakroub

Duguet

Esvan

et al. 2021

Surfaces and Interfaces

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Plasma polymerized organosilicon thin films were deposited in a MW-PECVD using hexadimethylsiloxane (HMDSO) as a precursor. Thin films were synthetized with different plasma conditions ranging from soft (low plasma energy) to hard (high plasma energy) ones. Quantitative 29 Si solid state NMR and FTIR spectroscopy were used to characterize the bulk composition. X-ray photoelectron spectroscopy (XPS) coupled with Density functional theory (DFT) calculations were used to determine the surface chemical composition. The bulk and the surface of the plasma polymerized HMDSO (PP-HMDSO) showed a complex chemical composition. The four main environments M, D, T and Q were present in the films. An additional environment Si(CH2)(CH3)3 denoted S was detected in the PP-HMDSO films. The chemical composition comparison showed a difference between the bulk and the surface of the films. Under soft plasma conditions, a high amount of SiOC3 termination was present in the bulk of the films. While, the SiO2C2 chains were highly present on the surface. On the other hand, under hard plasma conditions, the number of the SiOC3 termination increased on the surface and decreased in the bulk. Under soft plasma conditions, the PP-HMDSO structure was close to PDMS, while under hard plasma conditions, the PDMS similarity was lost.

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“…At atmospheric pressure different dual frequency DBDs have been considered. A 200 kHz glow like DBD generated by 1000 V voltage and biased by a low amplitude 13.56 MHz voltage (250 V) was studied [28,29]. Experimental and numerical results show that the electric field is temporally modulated by the RF which slows down the DBD development and thus allows to generate a homogeneous and high power discharge, able to efficiently dissociate the thin film precursors.…”

Section: Introductionmentioning

confidence: 99%

Dual frequency DBD: influence of the amplitude and the frequency of applied voltages on glow, Townsend and radiofrequency DBDs

Bazinette

Sadeghi

Massines

2020

Plasma Sources Sci. Technol.

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To study dual frequency Townsend glow and radio frequency DBDs in an Ar/NH3 Penning mixture, different voltages are applied on each electrode of a plane/plane DBD. The one which has the higher amplitude and frequency, V H, determines the discharge regime. The other one, which has a lower amplitude and frequency, V L, is more similar to a bias voltage. V H frequency ranges from 50 kHz to 13.56 MHz and V L frequency from 1 kHz to 2 MHz. The amplitude of V L is always kept lower than the breakdown voltage. The discharge behavior is characterized by space and phase resolved optical emission spectroscopy and Fourier transform of the plasma induced light intensity. When the frequencies of two voltages are close to each other, V L higher than 150 V increases the discharge light intensity. In glow and Townsend discharges, this increase is attributed to the enhancement of the plasma density, due to the ions drift from the plasma bulk to the cathode, which produces a higher secondary electron emission. For the radiofrequency discharge, the enhancement of the light intensity is attributed to an enhancement of the positive space charge due to the higher voltage amplitude. When the frequencies of two voltages are very different, e.g. for V L between 1 and 100 kHz and a 5.5 MHz α-RF discharge, the behavior largely depends on V L amplitude. Above some low frequency (LF), the discharge tends to extinguish when V L amplitude is at its maximum. This is explained by a diminution of the plasma density resulting from the ion drift to the cathode due to V L. When V L is very high, it enhances the discharge intensity. This discharge amplification is associated with a transition from α to γ RF mode, which only occurs when the two voltages have the same polarity. Whatever the RF discharge mode, γ or α, the discharge is diffuse. To determine the interest of LF-RF dual frequency DBD for the PECVD, SiOx coatings, made with a single and a dual LF-RF frequency DBDs, are compared. It is concluded that the ɣ dual frequency removes OH functions from the material lattice and densifies the layer.

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Atmospheric-pressure silica-like thin film deposition using 200 kHz/13.56 MHz dual frequency excitation

Cited by 7 publications

References 66 publications

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Foundations of plasma surface functionalization of polymers for industrial and biological applications

Comparative study of bulk and surface compositions of plasma polymerized organosilicon thin films

Dual frequency DBD: influence of the amplitude and the frequency of applied voltages on glow, Townsend and radiofrequency DBDs

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