2007
DOI: 10.1016/s1369-7021(07)70306-1
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Atom probe tomography today

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Cited by 114 publications
(82 citation statements)
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“…In the last decade, the method was revolutionized by introducing fast delayline detector systems [17][18][19] and sample preparation based on focused ion beams (FIB) [20,21]. Nowadays, a reconstructed volume of typically 10 6 nm 3 , comprising about 100 million atoms, can be regularly expected from a successful measurement.…”
Section: Atom Probe Tomographymentioning
confidence: 99%
“…In the last decade, the method was revolutionized by introducing fast delayline detector systems [17][18][19] and sample preparation based on focused ion beams (FIB) [20,21]. Nowadays, a reconstructed volume of typically 10 6 nm 3 , comprising about 100 million atoms, can be regularly expected from a successful measurement.…”
Section: Atom Probe Tomographymentioning
confidence: 99%
“…Current wide angle instruments with high frequency HV-or laser-pulsers are capable of analyzing a volume of 100 Â 100 Â 1000 nm 3 within a timescale of a few hours or days at maximum. 8,9 Accordingly, a statistically significant number of interfaces can be studied by an adequately fast method. Accurate analysis of multilayer interfaces with APT is nowadays well established 5 even with isotope multilayers.…”
mentioning
confidence: 99%
“…Recently, Schiffbauer and Xiao (2009) Atom probe tomography (APT) delivers the highest spatial resolution (<0.3 nm) for 3D compositional information of any microscopy technique, thus enabling analytics at the atomic scale (Kelly and Miller 2007). The technique combines a time-of-flight mass spectrometer with a fieldion microscope capable of atomic scale imaging (Cerezo et al 2007). The combination with position sensing allows for a full 3D reconstruction by APT.…”
Section: Discussionmentioning
confidence: 99%