1997
DOI: 10.2172/666057
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Atomic and electronic structures of novel silicon surface structures

Abstract: The modification of silicon surfaces is presently of great interest to the semiconductor device community. Three distinct areas are the subject of inquiry: first, modification of the silicon electronic structure; second, passivation of the silicon surface; and third, functionalization of the silicon surface. It is believed that surface modification of these types will vii *.. Vlll has been at my side throughout my graduate career and my son, Casey Jeffrey, has really livened up the end. My parents, in-laws, an… Show more

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Cited by 3 publications
(2 citation statements)
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“…annealed at 700 • C (Si(1 1 1) C 5 /700 • ). In general agreement with previously published results [16][17][18], EW XPS showed no signicant difference between the Si(1 1 1) H and Si(1 1 1) C 5 samples, while the EW XPS was significantly higher for the Si(1 1 1) C 5 /700 • material because of the added contribution to the spectrum from the Si(1 1 1) (7 × 7) reconstruction. The PE max values of these three spectra were constant to within 0.1 eV because all the spectra were dominated by the bulk Si peak.…”
Section: Introductionsupporting
confidence: 92%
“…annealed at 700 • C (Si(1 1 1) C 5 /700 • ). In general agreement with previously published results [16][17][18], EW XPS showed no signicant difference between the Si(1 1 1) H and Si(1 1 1) C 5 samples, while the EW XPS was significantly higher for the Si(1 1 1) C 5 /700 • material because of the added contribution to the spectrum from the Si(1 1 1) (7 × 7) reconstruction. The PE max values of these three spectra were constant to within 0.1 eV because all the spectra were dominated by the bulk Si peak.…”
Section: Introductionsupporting
confidence: 92%
“…Analyses were performed at BL 8-1 and BL 10-1 of the Stanford Synchrotron Radiation Laboratory. The fitting procedure for the spectra is described in a previous study 2 . The monolayer coverages of surface species were determined from the photoelectron signal, accounting for exponential attenuation of the electrons from the bulk, as described by Himpsel,et.…”
Section: Introductionmentioning
confidence: 99%