Atomic emission stratigraphy by laser-induced plasma spectroscopy: Quantitative depth profiling of metal thin film systems

Nagy, Tristan O.; Pacher, Ulrich; Pöhl, Hannes; Kautek, Wolfgang

doi:10.1016/j.apsusc.2014.01.125

Cited by 21 publications

(8 citation statements)

References 24 publications

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“…Eq. 1) due to the sub-surface void accumulation [3,7,37,38]. This qualitative hypothetical model is correlated to a recently developed concept for sub-picosecond laser interactions with metals, where nanovoids are observed to form due to rarefaction processes in the near-surface region of the target [37,59].…”

Section: Resultsmentioning

confidence: 73%

“…Laser processing in liquids has attracted attention because of potential applications in surface cleaning, etching, welding, drilling, cutting, and micromachining of metals, alloys, polymers, semiconductors, glasses and ceramics [1,2]. Laser ablation of metals in liquids enables the insitu study of corrosion and repassivation processes [3,4] as well as the production of biocompatible nanoparticles for medical and catalytic applications [5][6][7]. The pulsed laser generation of colloidal metal nanoparticles (e.g., Ag, Au, Pt, Pd, Cu, Fe, Ni, W) in distilled water and organic solvents attracted much attention in the past two decades [7][8][9][10][11][12][13][14][15][16][17].…”

Section: Introductionmentioning

confidence: 99%

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Pulsed laser ablation and incubation of nickel, iron and tungsten in liquids and air

Lasemi

Pacher

Zhigilei

et al. 2018

Applied Surface Science

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Highlights Laser ablation incubation at air is controlled by thermal properties of the metal.  Incubation in liquid contact is determined by the mechanical impact on the solid material by the bubble cavitation and the ultimate tensile stress of the metal. AbstractIncubation effects in the nanosecond laser ablation of metals exhibit a strong dependence on the thermal and mechanical properties of both the target material and the background gas or liquid. The incubation in air is controlled mainly by thermal properties such as the heat of vaporization. In liquid, the correlation of the incubation and the ultimate tensile stress of the metals suggests that incubation may be related to the mechanical impact on the solid material by the cavitation bubble collapse, causing accumulation of voids and cracks in the subsurface region of the ablation craters. At high ultimate tensile stress, however, the low sensitivity to the environment suggests that the mechanical impact is likely to play a negligible role in the incubation. Finally, the correlation between the incubation and the carbon content of alcoholic liquids may be explained by an absorptivity increase of the cavity surfaces due to carbonaceous deposits generated by laser-induced pyrolysis, or by the mechanical impact of long-living bubbles at higher dynamic viscosity of liquids.

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Section: Resultsmentioning

confidence: 73%

Section: Introductionmentioning

confidence: 99%

Pulsed laser ablation and incubation of nickel, iron and tungsten in liquids and air

Lasemi

Pacher

Zhigilei

et al. 2018

Applied Surface Science

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“…Due to the Gaussian laser beam profile, not only the valley of the crater is affected by the plasma pulse, also the slopes are irradiated. Even though the laser fluence here drops below the ablation threshold of fresh material, incubation effects lead to an additional broadening of the craters, shaping them Gaussian-like [9,10,12]. This explains the presence of the emission lines of the coating material in the spectra recorded subsequent to the breach of the coating layer.…”

Section: Thickness Determinationmentioning

confidence: 84%

Investigation of the wavelength dependence of laser stratigraphy on Cu and Ni coatings using LIBS compared to a pure thermal ablation model

et al. 2017

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In this study, galvanic coatings of Cu and Ni, typically applied in industrial standard routines, were investigated. Ablation experiments were carried out using the first two harmonic wavelengths of a pulsed Nd:YAG laser and the resulting plasma spectra were analysed using a linear Pearson correlation method. For both wavelengths the absorption/ablation behaviour as well as laser-induced breakdown spectroscopy (LIBS) depth profiles were studied varying laser fluences between 4.3-17.2 J/cm 2 at 532 nm and 2.9-11.7 J/cm 2 at 1064 nm. The LIBS-stratigrams were compared with energydispersive X-ray spectroscopy of cross-sections. The ablation rates were calculated and compared to theoretical values originating from a thermal ablation model. Generally, higher ablation rates were obtained with 532 nm light for both materials. The light-plasma interaction is suggested as possible cause of the lower ablation rates in the infrared regime. Neither clear evidence of the pure thermal ablation, nor correlation with optical properties of investigated materials was obtained.

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“…Researchers have achieved varying degrees of success in different fields [14][15][16][17]. Especially in the field of analysis of thin-film materials, a lot of achievements have been made on LIBS technology [18][19][20]. In our previous works, picosecond LIBS technology has been employed to conduct rapid element quantitative analysis and LIBS micro-analysis on Al-In-Sn-O thin films [21] and Cu(In, Ga)Se 2 thin films [22,23].…”

Section: Introductionmentioning

confidence: 99%

Rapid quantitative analysis and optical properties of ZCTO thin films based on picosecond laser-induced breakdown spectroscopy

Gao

Liu

et al. 2021

Appl. Phys. B

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The target element concentration ratios of Zn-Cr-Sn-O(ZCTO) thin films with different sputtering parameters prepared by radio frequency (RF) magnetron sputtering were analyzed by picosecond laser-induced breakdown spectroscopy (PS-LIBS). PS-LIBS method was employed to measure the thickness of the thin film in the depth profile of the ZCTO sample. The measured value of PS-LIBS is 372 ± 53 nm, presenting a small error with the actual value. The band gap of ZCTO thin-film samples is closely associated with the content ratio of the Sn element, which increases as sputtering power and sputtering pressure increase. As illustrated by comparing the relationship between the value of energy-dispersive X-ray spectroscopy (EDS) and transmittance, the band gap of ZCTO films increases with the increasing Sn/Zn content ratio. This can be represented by the LIBS spectral line of the corresponding element. Then, the Sn/Zn ratio of the films prepared under different sputtering parameters was quantitatively analyzed. The calibration curve of a single sputtering variable was obtained, while the rapid quantitative analysis of the Sn/Zn ratio based on multiple sputtering variables was realized. Moreover, the rapid micro-analysis of ZCTO films by the picosecond laser-induced breakdown spectroscopy method was realized using this method.

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Atomic emission stratigraphy by laser-induced plasma spectroscopy: Quantitative depth profiling of metal thin film systems

Cited by 21 publications

References 24 publications

Pulsed laser ablation and incubation of nickel, iron and tungsten in liquids and air

Pulsed laser ablation and incubation of nickel, iron and tungsten in liquids and air

Investigation of the wavelength dependence of laser stratigraphy on Cu and Ni coatings using LIBS compared to a pure thermal ablation model

Rapid quantitative analysis and optical properties of ZCTO thin films based on picosecond laser-induced breakdown spectroscopy

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