Atomic force microscope probe-based nanometric scribing

Malekian, Mohammad; Park, S S; Strathearn, D.; Mostofa, Golam; Jun, Martin B. G.

doi:10.1088/0960-1317/20/11/115016

Cited by 35 publications

(20 citation statements)

References 20 publications

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“…The interfacial friction usually causes elastic deformation in the contact area, while the plowing friction induces plastic deformation and material removal. Although the contributions Contents lists available at ScienceDirect journal homepage: www.elsevier.com/locate/triboint from the interfacial friction and the plowing friction in the singlepass nanoscratch on glass with a thin chromium film have been analyzed by Malekian et al [19], these contributions may be very different in multi-pass reciprocating sliding, which has not been addressed yet. Therefore, for the phosphate laser glass, quantitative analysis of interfacial and plowing frictions would help understand the different mechanisms of friction and damage during single-pass nanoscratch and multi-pass reciprocating sliding.…”

Section: Introductionmentioning

confidence: 99%

Quantitative investigation on single-asperity friction and wear of phosphate laser glass against a spherical AFM diamond tip

Yu¹,

Hu²,

Jia³

et al. 2015

Tribology International

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Section: Introductionmentioning

confidence: 99%

Quantitative investigation on single-asperity friction and wear of phosphate laser glass against a spherical AFM diamond tip

Yu¹,

Hu²,

Jia³

et al. 2015

Tribology International

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“…The friction coefficient is another effective parameter to assess the scratching process, which is defined as the ratio of the cutting force and the normal force [19,32]. According to Fig.…”

Section: The Effect Of Scratching Speedmentioning

confidence: 99%

Modeling and simulation of the probe tip based nanochannel scratching

Guo

Tian

Liu

et al. 2017

Precision Engineering

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Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP URL' above for details on accessing the published version and note that access may require a subscription. AbstractThis paper presents the theoretical modeling and numerical simulation of the probe tip based nanochannel scratching. According to the scratching depth, the probe tip is modeled as a spherical capped conical tip or a spherical capped regular three side pyramid tip to calculate the normal force needed for the nanochannel scratching.In order to further investigate the impact of scratching speed, scratching depth and scratching direction on the scratching process, the scratching simulation is implemented in LS-DYNA software, and a mesh-less method called smooth particle hydrodynamics (SPH) is used for the sample construction. Based on the theoretical and simulated analyses, the increase of the scratching speed, the scratching depth and the face angle will result in an increase in the normal force. At the same scratching depth, the normal forces of the spherical capped regular three side pyramid tip model are different in different scratching directions, which are in agreement with the theoretical calculations in the d 3 and d 4 directions. Moreover, the errors between the theoretical and simulated normal forces increase as the face angle increases.

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“…Considering the optimization of fabrication methods for precise dimensional control and cost-effectiveness, scanning-probe lithography, which mainly refers to the use of the scanning tunneling microscope and atomic force microscope (AFM) [24][25][26][27][28][29][30] as 'lithographic' tools, is an emerging area in the field of nanofabrication. For example, the diamond tip of a cantilever installed in an AFM is used to mechanically pattern nanoscale features on the surfaces of substrates, such as silicon and metals.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

Lin

Zhan

et al. 2017

Microsyst Nanoeng

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In this paper, we describe a novel and simple process for the fabrication of all-transparent and encapsulated polymeric nanofluidic devices using nano-indentation lithography. First, a nanomechanical probe is used to 'scratch' nanoscale channels on polymethylmethacrylate (PMMA) substrates with sufficiently high hardness. Next, polydimethylsiloxane (PDMS) is used twice to duplicate the nanochannels onto PDMS substrates from the 'nano-scratched' PMMA substrates. A number of experiments are conducted to explore the relationships between the nano-indentation parameters and the nanochannel dimensions and to control the aspect ratio of the fabricated nanochannels. In addition, traditional photolithography combined with soft lithography is employed to fabricate microchannels on another PDMS 'cap' substrate. After manually aligning the substrates, all uncovered channels on two separate PDMS substrates are bonded to achieve a sealed and transparent nanofluidic device, which makes the dimensional transition from microscale to nanoscale feasible. The smallest dimensions of the achievable nanochannels that we have demonstrated thus far are of~20 nm depth and~800 nm width, with lengths extendable beyond 100 μm. Fluid flow experiments are performed to verify the reliability of the device. Two types of colloidal solution are used to visualize the fluid flow through the nanochannels, that is, ethanol is mixed with gold colloid or fluorescent dye (fluorescein isothiocyanate), and the flow rate and filling time of liquid in the nanochannels are estimated based on time-lapsed image data. The simplicity of the fabrication process, bio-compatibility of the polymer substrates, and optical transparency of the nanochannels for flow visualization are key characteristics of this approach that will be very useful for nanofluidic and biomolecular research applications in the future. INTRODUCTIONThe field of nanofluidics is widely known as the research and application of the behaviors of liquid flow in a specific area that is confined to the nanoscale 1 . A significant research interest has risen in this field due to the unique nanofluidic phenomena and flow properties that are markedly different from those in the welldeveloped microfluidics field. For example, since the dimensions of typical nanochannels are comparable to those of biomolecules, such as proteins and DNAs, they may be used for the transportation of selective molecules and DNA stretching. Furthermore, similar to microchannels, the surface-to-volume ratio of nanochannel structures is ultra-high, which leads to a diffusionlimited reaction 2 and negative water pressure induced by capillarity 3 . Moreover, because the size of the electrical double layer formed by strong electrostatic interactions between ions and the charged surface is in the range of 1 − 100 nm (Refs. 4,5), nanoflows in nanochannels will have flow properties that significantly deviate from Newtonian fluids. Based on these novel dimensional effects, many significant applications have been explored over the past ...

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Atomic force microscope probe-based nanometric scribing

Cited by 35 publications

References 20 publications

Quantitative investigation on single-asperity friction and wear of phosphate laser glass against a spherical AFM diamond tip

Quantitative investigation on single-asperity friction and wear of phosphate laser glass against a spherical AFM diamond tip

Modeling and simulation of the probe tip based nanochannel scratching

Fabrication of all-transparent polymer-based and encapsulated nanofluidic devices using nano-indentation lithography

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